• CN：11-2187/TH
  • ISSN：0577-6686
机械工程学报

›› 2006, Vol. 42 ›› Issue (增刊): 65-68.

• 论文 • 上一篇    下一篇

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微机电系统多学科设计优化

俞必强;翁海珊;邱丽芳   

  1. 北京科技大学机械工程学院
  • 发布日期:2006-12-30

MULTIDISCIPLINARY DESIGN OPTIMIZATION OF MICRO ELECTRO MECHANICAL SYSTEMS

YU Biqiang; WENG Haishan; QIU Lifang   

  1. Mechanical Engineering School, University of Science and Technology Beijing
  • Published:2006-12-30

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摘要： 多学科设计优化是一种针对于涵盖多个学科领域的复杂系统进行设计优化的方法，强调各子学科系统在独自设计优化的基础上的相互之间的并行协作。鉴于微机电系统(Micro electro mechanical systems，MEMS)设计中存在多学科交叉耦合等问题，将多学科优化设计方法引入到MEMS的设计中，研究分析MEMS本身的多学科特性和设计现状，建立面向MEMS的多学科设计优化系统(Micro electro mechanical multidisciplinary design optimization sys-tem，MMDOS)，提出四种多学科设计优化方法，对提升MEMS的设计水平和产品质量具有积极意义。

关键词: 多学科设计优化, 微机电系统, 优化设计

Abstract: Multidisciplinary design optimization (MDO) is a methodology for the design of complex system, the aim of which is to emphasize the interaction between the several disciplines in their respective design optimization. Considering the problem of coupling between several different disciplines in the design of micro electro mechanical systems (MEMS), MDO method is introduced to handle this problem. In studying multidisciplinary character and current design status of MEMS, a novel MDO framework for MEMS – MMDOS is established，and four kinds of method of MDO are presented, which will help to raise the design level and improve the product quality.

Key words: Optimal design, Micro electro mechanical systems (MEMS) Multidisciplinary design optimization (MDO)

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