飞秒激光加工镍基合金无锥度微群孔试验研究

doi:10.3901/JME.260433

摘要/Abstract

摘要： 随着我国航空航天领域的发展，航空发动机热端构件的服役温度越来越高，以镍基合金为代表的耐高温材料正在被逐步应用于这些构件的加工制造中。同时为了进一步提高热端构件的服役性能和寿命，还需要利用气膜冷却技术将构件表面与炽热的燃气隔开，因此需要在热端构件上加工气膜冷却孔。飞秒超快激光由于其精密、低损伤、冷加工的特点，越来越契合镍基合金微孔的加工需求，但是由于这些气膜孔数量多，分布密集，位置精度高，使用倾斜工件钻孔的工艺难以满足无锥度群孔的加工需求，而倾斜激光钻孔又对光路数学模型的计算和运动控制精度有着极高的要求。因此，为了实现镍基合金无锥度阵列群孔的加工，提出了一种通过机床多轴联动实现无锥度微群孔加工的方法。首先探究了机床的插补速度、插补半径对微群孔的形貌影响，然后对飞秒激光加工微群孔的有效加工范围进行了试验研究，最后在镍基合金样件上开展群孔加工试验，并对试验结果进行了探讨分析，形成了完整的镍基合金无锥度微群孔加工工艺流程。最终在1 mm厚度的镍基合金上得到了平均锥度为-0.03°的5×5阵列微圆孔。

关键词: 飞秒激光, 镍基合金, 微孔加工, 锥度调控, 群孔加工

Abstract: As the service temperature of turbine blades and other hot-end components in aero-engines is increasing, nickel-based alloys, which represent high-temperature resistant materials, are gradually being used for their manufacturing. At the same time, in order to further improve the service performance of these components, it is necessary to process film cooling holes on their surfaces. Due to its precision, low damage, and cold processing characteristics, femtosecond ultrafast laser is increasingly suitable for the processing of nickel-based micro-group holes. However, due to the large number of gas film holes, dense distribution, and high positioning accuracy, the inclined workpiece drilling process is difficult to meet the processing requirements of non-taper micro-group holes. In addition, the inclined laser drilling process has high requirements for the calculation and motion control precision of the optical path mathematical model. Therefore, in order to achieve the processing of non-taper micro-group holes in nickel-based alloy, a method of achieving non-taper group holes processing through multi-axis linkage of the machine tool is proposed. Firstly, the influence of machine tool motion parameters are explored, such as the feed speed and feed radius of the machine tool on the micro-group holes morphology. Then, the experimental study on the effective processing range of femtosecond laser processing of micro-group holes is carried out. Finally, based on the parameter exploration of the non-taper single hole experiment, the group hole processing experiment is carried out on a flat sample, and the experimental results are discussed and analyzed to form a complete flat group hole processing process. Ultimately, the 5×5 micro-group holes with an average taper of -0.03 ° was obtained on a nickel-based alloy with a thickness of 1 mm.

Key words: femtosecond laser, nickel-based alloys, microhole machining, taper control, group holes machining

中图分类号:

TN249

张书愿, 周熙杰, 谢合瑞, 范润泽, 梅雪松, 崔健磊. 飞秒激光加工镍基合金无锥度微群孔试验研究[J]. 机械工程学报, 2026, 62(9): 420-429.

ZHANG Shuyuan, ZHOU Xijie, XIE Herui, FAN Runze, MEI Xuesong, CUI Jianlei. Experimental Study on Femtosecond Laser Processing Non-taper Micro-group Holes in Nickel-based Alloys[J]. Journal of Mechanical Engineering, 2026, 62(9): 420-429.

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链接本文: http://www.cjmenet.com.cn/CN/10.3901/JME.260433

http://www.cjmenet.com.cn/CN/Y2026/V62/I9/420

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