外加电压复合飞秒激光环进层切微孔工艺研究

doi:10.3901/JME.2025.23.240

机械工程学报 ›› 2025, Vol. 61 ›› Issue (23): 240-249.doi: 10.3901/JME.2025.23.240

• 数字化设计与制造 • 上一篇

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外加电压复合飞秒激光环进层切微孔工艺研究

王后孝^1,2, 李锐¹, 戴新民², 夏凯波²

1. 山东理工大学山东省高性能精密制造与复合加工重点实验室淄博 255000;
2. 江苏大学江苏省光子制造科学与技术重点实验室镇江 212013

收稿日期:2025-01-12 修回日期:2025-07-02 发布日期:2026-01-22
作者简介:王后孝(通信作者),男,1977 年出生,博士,副教授。主要研究方向为激光制孔和激光复合加工。E-mail:wanghx@sdut.edu.cn;wanghx@ujs.edu.cn
基金资助:
山东省自然科学基金(ZR2022ME080);国家自然科学基金(52205469)资助项目

Study on Hybrid Femtosecond Laser Layered Micro-hole Drilling Technique via Applying External Voltage Based on Ring Feeding

WANG Houxiao^1,2, LI Rui¹, DAI Xinmin², XIA Kaibo²

1. Shandong Provincial Key Laboratory of High Performance Precision Manufacturing and Hybrid Machining, Shandong University of Technology, Zibo 255000;
2. Jiangsu Provincial Key Laboratory of Photon Manufacturing Science and Technology, Jiangsu University, Zhenjiang 212013

Received:2025-01-12 Revised:2025-07-02 Published:2026-01-22

摘要/Abstract

摘要： 提出外加电压复合飞秒激光环进层切微孔方法，对GH4133高温合金板材和Al₂O₃陶瓷片进行了工艺实验研究。对比分析了电压场强对飞秒激光环进层切微孔成形的影响机理与规律，研究了外加电压对飞秒激光环进层切通孔孔壁化学成分和通孔中部纵截面显微硬度的影响机理。结果表明，所用工艺方法对不同工件材料和工艺参数条件的加工适应性好，加工微孔的孔口形貌良好，孔形稳定性和可重复性好。当外加电压时，通孔孔壁表面均匀性改善而粗糙度减小。外加电压有效增大了孔深，一定程度消减了锥度，但对孔径和圆度影响不明显。外加电压消减了孔壁氧和碳的含量，有效提升了孔壁周边微区的显微硬度。

关键词: 飞秒激光, 外加电压, 微孔, 环进, 层切

Abstract: A method, which is called the hybrid femtosecond laser layered micro-hole drilling via applying external voltage based on ring feeding, is proposed for carrying out an experimental study using super-alloy GH4133 sheets and ceramic Al₂O₃chips. The effect of the applied voltage field intensity on the micro-hole formation characteristics induced by femtosecond laser layered drilling via ring feeding is analyzed comparatively with mechanism discussion. Furthermore, after femtosecond laser layered drilling based on ring feeding, the effect of the external voltage applied on through-hole sidewall element contents and longitudinal section middle micro hardness performance is also studied on the basis of the mechanism analysis. It is indicated that the machining adaptability of the method proposed is good for different workpiece materials under different process conditions as a result of the good morphology for the micro-hole entrances and exits machined as well as the good stability and repeatability of the hole geometry. The surface roughness is reduced while the uniformity is improved for the through-hole sidewall by applying an external voltage. It is also found that the hole depth is effectively increased while the hole taper is reduced somewhat by using the external voltage, but the hole diameter and circularity are slightly influenced by the external voltage applied. In addition, both carbon and oxygen contents of the hole sidewall are reduced while the micro hardness performance for the micro region around the hole sidewall is effectively improved by applying an external voltage.

Key words: femtosecond laser, external voltage, micro-hole, ring feeding, layered drilling

中图分类号:

TN249

王后孝, 李锐, 戴新民, 夏凯波. 外加电压复合飞秒激光环进层切微孔工艺研究[J]. 机械工程学报, 2025, 61(23): 240-249.

WANG Houxiao, LI Rui, DAI Xinmin, XIA Kaibo. Study on Hybrid Femtosecond Laser Layered Micro-hole Drilling Technique via Applying External Voltage Based on Ring Feeding[J]. Journal of Mechanical Engineering, 2025, 61(23): 240-249.

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外加电压复合飞秒激光环进层切微孔工艺研究

Study on Hybrid Femtosecond Laser Layered Micro-hole Drilling Technique via Applying External Voltage Based on Ring Feeding

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