飞秒激光直写高Q值太赫兹柔性金属超材料

doi:10.3901/JME.2025.17.281

机械工程学报 ›› 2025, Vol. 61 ›› Issue (17): 281-290.doi: 10.3901/JME.2025.17.281

• 数字化设计与制造 • 上一篇

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飞秒激光直写高Q值太赫兹柔性金属超材料

曾秋铭^1,2, 黄异^1,2, 钟舜聪^1,2, 陈剑雄¹, 钟宇杰^1,2, 林廷玲^1,2, 陈雪峰³

1. 福州大学机械工程及自动化学院福州 350108;
2. 福州大学福建省太赫兹功能器件与智能传感重点实验室福州 350108;
3. 西安交通大学机械工程学院西安 710049

收稿日期:2024-09-08 修回日期:2025-02-21 发布日期:2025-10-24
作者简介:曾秋铭，男，1997年出生，博士。主要研究方向为飞秒激光微纳加工技术、太赫兹功能器件。E-mail：479076368@qq.com;黄异(通信作者)，男，1990年出生，博士，副研究员，硕士研究生导师。主要研究方向为微纳光学器件加工制造技术、太赫兹功能器件、太赫兹光谱分析与成像技术。E-mail：YiHuang@fzu.edu.cn
基金资助:
国家自然科学基金(52275096)、福建省技术创新重点攻关及产业化(2022G021)和福建省自然科学基金(2022J01071)资助项目。

High-quality Terahertz Flexible Metal Metamaterials Fabricated by Femtosecond Laser Direct Writing

ZENG Qiuming^1,2, HUANG Yi^1,2, ZHONG Shuncong^1,2, CHEN Jianxiong¹, ZHONG Yujie^1,2, LIN Tingling^1,2, CHEN Xuefeng³

1. School of Mechanical Engineering and Automation, Fuzhou University, Fuzhou 350108;
2. Fujian Provincial Key Laboratory of Terahertz Functional Devices and Intelligent Sensing, Fuzhou University, Fuzhou 350108;
3. School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049

Received:2024-09-08 Revised:2025-02-21 Published:2025-10-24

摘要/Abstract

摘要： 太赫兹超材料(THz-MMs)凭借其独特的电磁调控能力，成为高性能太赫兹功能器件的核心关键。当前THz-MMs的制备普遍需要结合多种硅基微加工工艺，制备过程繁复且往往涉及多种精密设备，导致制备周期长、成本高昂。提出飞秒激光直写金属薄膜的方法，利用飞秒激光极小热扩散的烧蚀特性和对脉冲能量的精确控制，实现太赫兹柔性金属超材料的一次成型加工。以所设计的混合矩形孔径柔性金属超材料作为范例，验证了该方法的有效性。实验结果表明，该飞秒激光直写的超材料支持两种表面等离子体模式之间的强耦合作用，在透射谱显示出高Q值拉比分裂峰。通过调整参数L₂，分裂峰的频率从1.17 THz变化到0.97 THz，Q值从10.79提高到34.26。可以预见，飞秒激光直写技术有望为低成本、高性能的太赫兹功能器件的快速加工提供借鉴。

关键词: 太赫兹, 柔性金属超材料, 飞秒激光, 强耦合, 局域表面等离激元

Abstract: Terahertz metamaterials (THz-MMs) play a crucial role in high-performance terahertz functional devices due to their unique electromagnetic regulatory capabilities. However, the current preparation process for THz-MMs is complex and time-consuming, requiring the combination of various silicon-based micromachining processes and precision equipment, leading to high costs. A femtosecond laser writing method for metal thin films to address these challenges is proposed. By utilizing the minimal thermal diffusion ablation characteristics of femtosecond laser and precise control of pulse energy, the study successfully achieves a single forming process for terahertz flexible metal metamaterials. The effectiveness of the proposed method is demonstrated using a hybrid rectangular aperture flexible metal metamaterial as an example. Experimental results reveal that the femtosecond laser-written metamaterial supports strong coupling between two surface plasma modes and exhibits a high Q value Rabi splitting peak in the transmission spectrum. By adjusting parameter L₂, the frequency of the splitting peak can be tuned from 1.17 THz to 0.97 THz, while the Q value increases from 10.79 to 34.26. These findings suggest that femtosecond laser direct writing technology has the potential to revolutionize the rapid processing of low-cost, high-performance terahertz functional devices.

Key words: terahertz, flexible metal metamaterials, femtosecond laser, strong coupling, localized surface plasmon polaritons

中图分类号:

TH741
TN249

曾秋铭, 黄异, 钟舜聪, 陈剑雄, 钟宇杰, 林廷玲, 陈雪峰. 飞秒激光直写高Q值太赫兹柔性金属超材料[J]. 机械工程学报, 2025, 61(17): 281-290.

ZENG Qiuming, HUANG Yi, ZHONG Shuncong, CHEN Jianxiong, ZHONG Yujie, LIN Tingling, CHEN Xuefeng. High-quality Terahertz Flexible Metal Metamaterials Fabricated by Femtosecond Laser Direct Writing[J]. Journal of Mechanical Engineering, 2025, 61(17): 281-290.

参考文献

[1] COCKER T L, JELIC V, HILLENBRAND R, et al. Nanoscale terahertz scanning probe microscopy[J]. Nature Photonics, 2021, 15(8): 558-569.
[2] ZHANG X Q, XU Q, XIA L B, et al. Terahertz surface plasmonic waves: A review[J]. Advanced Photonics, 2020, 2(1): 014001.
[3] 姚建铨. 太赫兹技术及其应用[J]. 重庆邮电大学学报, 2010, 22(6): 703-707. YAO Jianquan. Introduction of THz-wave and its applications[J]. Journal of Chongqing University of Postsand Telecommunications, 2010, 22(6): 703-707.
[4] NAGATSUMA T, DUCOURNAU G, RENAUD C C. Advances in terahertz communications accelerated by photonics[J]. Nature Photonics, 2016, 10(6): 371-379.
[5] ZHONG S C. Progress in terahertz nondestructive testing: A review[J]. Front. Mech. Eng, 2019, 14(3): 273-281.
[6] YAN Z, ZHU L G, MENG K, et al. THz medical imaging: From in vitro to in vivo[J]. Trends in Biotechnology, 2022, 40(7): 816-830.
[7] COCKER T L, JELIC V, GUPTA M, et al. An ultrafast terahertz scanning tunnelling microscope[J]. Nature Photonics, 2013 7(8): 620-625.
[8] ZHUANG X L, ZHANG W, WANG K M, et al. Active terahertz beam steering based on mechanical deformation of liquid crystal elastomer metasurface[J]. Light-Science & Applications, 2023, 12(1): 2095-5545.
[9] WANG Q, GAO B, RAGLIONE M, et al. Design, fabrication, and modulation of THz bandpass metamaterials[J]. Laser Photon. Rev, 2019, 13(11): 1900071.
[10] WANG D X, XU K D, LUO S Y, et al. A high Q-factor dual-band terahertz metamaterial absorber and its sensing characteristics[J]. Nanoscale, 2023, 15(7): 3398-3407.
[11] DEGL'INNOCENTI R, LIN H Y, NAVARRO-CÍA M. Recent progress in terahertz metamaterial modulators[J]. Nanophotonics, 2022, 11(8): 1485-1514.
[12] CHEN Y, AI B, WONG Z J. Soft optical metamaterials[J]. Nano Convergence, 2020, 7(1): 18.
[13] LI W, XU M, XU H X, et al. Metamaterial absorbers: From tunable surface to structural transformation[J]. Adv Mater, 2022, 34(38): 2202509.
[14] HUANG Y, ZHONG S, SHI T, et al. HR-Si prism coupled tightly confined spoof surface plasmon polaritons mode for terahertz sensing[J]. Optics. Express, 2019, 27(23): 34067-34078.
[15] LIN T, HUANG Y, ZHONG S, et al. Field manipulation of electromagnetically induced transparency analogue in terahertz metamaterials for enhancing liquid sensing[J]. Optics and Lasers in Engineering, 2022, 157: 107127.
[16] QING Y M, REN Y, LEI D, et al. Strong coupling in two-dimensional materials-based nanostructures: A review[J]. Journal of Optics, 2022, 24(2): 024009.
[17] 郭建勇, 梁庆宣, 江子杰, 等. 一种熔融沉积3D打印的高性能超材料吸波结构[J]. 机械工程学报, 2019, 55(23): 226-232. GUO Jianyong, LIANG Qingxuan, JIANG Zijie, et al. A High-performance metamaterials absorbing structures based on fused deposition modeling[J]. Journal of Mechanical Engineering, 2019, 55(23): 226-232.
[18] ABUJETAS D R, VAN HOOF N, HUURNE S, et al. Spectral and temporal evidence of robust photonic bound states in the continuum on terahertz metasurfaces[J]. Optica, 2019, 6(8): 996-1001.
[19] LIU D, YU X, WU F, et al. Terahertz high-Q quasi-bound states in the continuum in laser-fabricated metallic double-slit arrays[J]. Optics Express, 2021, 29(16): 24779-24791.
[20] YU R, ALAEE R, LEDERER F, et al. Manipulating the interaction between localized and delocalized surface plasmon-polaritons in graphene[J]. Physical Review B, 2014, 90(8): 085409.
[21] ZHAO X, CHEN C, KAJ K, et al. Terahertz investigation of bound states in the continuum of metallic metasurfaces[J]. Optica, 2020, 7(11): 1548-1554.
[22] 韩利, 邢怀中. 黑磷纳米盘-层等离激元系统中的各向异性可调多阶强耦合[J]. 红外与毫米波学报, 2022, 41(3): 652-658. HAN Li, XING Huaizhong. Anisotropic tunable multi-order strong coupling in black phosphorous nanodisk-sheet plasmonic system[J]. Journal of Infrared Millimeter Waves, 2022, 41(3): 652-658.
[23] 张星源, 谷建强, 师文桥. 基于金属裂环谐振器的太赫兹连续域束缚态超表面[J]. 中国激光, 2023, 50(2): 139-147. ZHANG Xingyuan, GU Jianqiang, SHI Wenqiao. Terahertz metasurface with bound states in continuum based on metal split ring resonator[J]. Chinese of Journal of Lasers, 2023, 50(2): 139-147.
[24] 杜云峰, 姜交来, 廖俊生. 超材料的应用及制备技术研究进展[J]. 材料导报, 2016(9): 115-121. DU Yunfeng, JIANG Jiaolai, LIAO Junsheng. Review on fabrication and application of metamaterial[J]. Materials Reports, 2016(9): 115-121.
[25] ZHANG C, MCKEON L, KREMER M P, et al. Additive-free MXene inks and direct printing of micro-supercapacitors[J]. Nature Communications, 2019, 10(1): 1795.
[26] CHEN C, KUONG C N, ZHANG F, et al. Towards obtaining high-quality surfaces with nanometric finish by femtosecond laser ablation: A case study on coppers[J]. Optics & Laser Technology, 2022, 155: 108382.
[27] DUAN L, ZHOU H, DUAN J A. Micro-groove manufacturing via a femtosecond laser on optically clear adhesive films[J]. Applied Surface Science, 2022, 604: 154439.
[28] ZOU T, ZHAO B, XIN W, et al. Birefringent response of graphene oxide film structurized via femtosecond laser[J]. Nano Research, 2021, 15(5): 4490-4499.
[29] 赵圆圆, 金峰, 董贤子, 等. 飞秒激光双光子聚合三维微纳结构加工技术[J]. 光电工程, 2023, 50(3): 1-34. ZHAO Yuanyuan, JIN Feng, DONG Xianzi, et al. Femtosecond laser two-photon polymerization three-dimensional micro-nanofabrication technology[J]. Optp-Electronic Engineering, 2023, 50(3): 1-34.
[30] HAN N R, CHEN Z C, LIM C S, et al. Broadband multi-layer terahertz metamaterials fabrication and characterization on flexible substrates[J]. Optics Express, 2011, 19(8): 6990-6998.
[31] LIN Y, YAO H, JU X, et al. Free-standing double-layer terahertz band-pass filters fabricated by femtosecond laser micro-machining[J]. Optics Express, 2017, 25(21): 25125-25134.
[32] PITCHAPPA P, KUMAR A, LIANG H D, et al. Frequency-agile temporal terahertz metamaterials[J]. Advanced Optical Materials, 2020, 8(12): 2000101.
[33] GARCIA-VIDAL F J, MORENO E, PORTO J A, et al. Transmission of light through a single rectangular hole[J]. Phys Rev Lett, 2005, 95(10): 103901.
[34] YAHIAOUI R, CHASE Z A, KYAW C, et al. Dicke-cooperativity-assisted ultrastrong coupling enhancement in terahertz metasurfaces[J]. Nano Letters, 2022, 22(24): 9788-9794.

飞秒激光直写高Q值太赫兹柔性金属超材料

High-quality Terahertz Flexible Metal Metamaterials Fabricated by Femtosecond Laser Direct Writing

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