基于光学频率梳的高精度测距技术研究进展

doi:10.3901/JME.2023.20.244

摘要/Abstract

摘要： 精密测量技术是先进制造的重要支撑，其中精密激光测量技术在几何量测量特别是在线和高精度测量中应用最为广泛。针对先进制造更高的要求，新的激光测量技术不断发展，如基于光学频率梳的测距技术，其以宽光谱、窄脉宽、高频率稳定性的光频梳作为光源，通过相干探测可实现高精度和宽范围的绝对距离测量。同时，微纳制造工艺的提升以及光电子集成技术的发展，为进一步满足现场测量环境下高稳定性、仪器集成化和在线测量的需求提供了可能。围绕先进制造中高精度测距的需求，综述了光频梳测距方案的基本原理、性能指标与应用发展现状。首先，阐述了光学频率梳的基本特性和新型微腔孤子光频梳的相关研究；然后，详细介绍了光频梳频域、时域测距技术的测量原理和研究进展，包括色散干涉法、合成波长法、参考臂扫描法、重复频率扫描法和双光梳异步光学采样法等；最后，分析并比较了现有技术的发展进程及其优化方向，并对相关仪器化研制和现场应用进行了总结与展望。

关键词: 光学频率梳, 孤子光频梳, 高精度距离测量, 激光干涉测量, 先进制造

Abstract: Precision measurement technology is an important supporting technology of advanced manufacturing. Precision laser measurement technology is the most widely used in geometric measurement, especially in online and high-precision measurement. For advanced manufacturing higher requirements, new laser measurement technology continues to develop, such as the ranging technology based on optical frequency comb, its wide spectrum, narrow pulse width, high frequency stability of optical frequency comb as the light source, through the coherence detection can achieve high precision and wide range of absolute distance measurement. At the same time, the improvement of micro/nano manufacturing process and the development of optoelectronic integration technology make it possible to further meet the needs of high stability, instrument integration and online measurement in the field measurement environment. Based on the demand of high precision ranging in advanced manufacturing, the basic principle, performance index and application development of optical frequency comb ranging scheme are reviewed. Firstly, the basic characteristics of optical frequency comb and the related research of new microcavity soliton optical frequency comb are described. Then, the measurement principle and research progress of frequency domain and time domain ranging technology of optical frequency comb are introduced in detail, including dispersion interference method, synthetic wavelength method, reference arm scanning method, repeat frequency scanning method and dual-comb asynchronous optical sampling method. Finally, the development process and optimization direction of the existing technology are analyzed and compared, and the relevant instrument development and field application are summarized and prospected.

Key words: optical frequency comb, soliton microcomb, high precision ranging, laser interferometry, advanced manufacture

中图分类号:

TN249

贾琳华, 郑继辉, 张福民, 曲兴华. 基于光学频率梳的高精度测距技术研究进展[J]. 机械工程学报, 2023, 59(20): 244-260.

JIA Linhua, ZHENG Jihui, ZHANG Fumin, QU Xinghua. Research Progress of High Precision Ranging Technology Based on Optical Frequency Comb[J]. Journal of Mechanical Engineering, 2023, 59(20): 244-260.

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