激光加工平面型微超级电容器的研究进展与发展趋势

doi:10.3901/JME.2019.04.189

机械工程学报 ›› 2019, Vol. 55 ›› Issue (4): 189-206.doi: 10.3901/JME.2019.04.189

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激光加工平面型微超级电容器的研究进展与发展趋势

汤勇^1,2, 刘辉龙^1,2, 陆龙生^1,2, 谢颖熙^1,2, 袁伟^1,2, 万珍平^1,2, 李宗涛^1,2, 丁鑫锐^1,2

1. 华南理工大学机械与汽车工程学院广州 510640;
2. 广东省功能结构与器件智能制造工程实验室广州 510640

收稿日期:2018-06-03 修回日期:2018-11-30 出版日期:2019-02-20 发布日期:2019-02-20
通讯作者: 谢颖熙(通信作者),男,1989年出生,博士,助理研究员。主要研究方向为柔性储能器件微纳制造。Email:xieyingxi@scut.edu.cn
作者简介:汤勇,男,1962年出生,博士,教授,博士研究生导师。主要研究方向为表面功能结构加工、储能器件微纳制造等。Email:ytang@scut.edu.cn;刘辉龙,男,1991年出生,博士研究生。主要研究方向为柔性储能器件激光加工制造。Email:huiloongliu@gmail.com;陆龙生,男,1981年出生,博士,教授,博士研究生导师。主要研究方向为表面功能结构制造。Email:meluls@scut.edu.cn
基金资助:
国家自然科学基金（51735004，51775197）、广东省自然科学基金创新团队（2014A030312017）和博士后科学基金（2017M622679）资助项目

Research Progress and Perspective Trend of Laser-machined In-plane Micro-supercapacitors

TANG Yong^1,2, LIU Huilong^1,2, LU Longsheng^1,2, XIE Yingxi^1,2, YUAN Wei^1,2, WAN Zhenping^1,2, LI Zongtao^1,2, DING Xinrui^1,2

1. School of Mechanical & Automotive Engineering, South China University of Technology, Guangzhou 510640;
2. Intelligent Manufacturing Engineering Laboratory of Functional Structure and Devices in Guangdong Province, Guangzhou 510640

Received:2018-06-03 Revised:2018-11-30 Online:2019-02-20 Published:2019-02-20

摘要/Abstract

摘要： 可穿戴和便携式电子设备朝"轻薄化"与"小型化"方向的快速发展，极大地刺激了现代社会对高能量/功率密度、轻量便携化、柔性化储能器件的强烈需求。平面型微超级电容器（In-plane micro-supercapacitors，IPMSC）作为一种新型的微电源储能器件，以其超薄厚度、高功率密度和长循环寿命等优点被认为是集成电子器件重要的储能器件而备受关注。但是，随着IPMSC加工技术不断朝着高效、高精度和低成本等方向发展，常用的加工技术已难以满足其要求，操作更易、可扩展性更强、精度较高和成本更低的激光加工技术成为了目前IPMSC加工技术的研究热点。基于此，对不同类型IPMSC的工作原理及其电化学性能进行了总结，从激光还原、激光诱导、激光刻蚀和激光烧结四方面着手详细介绍了激光加工IPMSC的类型及加工工艺，重点综述了目前国内外关于激光加工IPMSC在机械性能和电化学性能等方面的研究进展情况，概括了用于IPMSC电解质的特性及其挑战，并在综合探讨激光加工IPMSC所面临的技术挑战基础上，对其在可穿戴和便携式电子设备中的应用前景进行了展望。

关键词: 储能器件, 激光加工, 平面型, 微超级电容器

Abstract: The rapid development of wearable and portable electronic devices towards "lightweight" and "miniaturization" has greatly stimulated the strong demand for high energy/power density, lightweight and portable and flexible energy storage devices in modern society. As a new type of micro-power storage device, in-plane micro-supercapacitors (IPMSCs) are considered as an important energy storage device for integrated electronic devices due to their ultra-thin thickness, high power density and long cycle life. However, with the development of IPMSC processing technology towards high efficiency, high precision, and low cost, the commonly used processing technologies cannot meet its requirements. A laser processing technology with easier operation, more scalable, higher precision and lower cost has been proposed and has become the research focus of IPMSC processing technology.The working principle and electrochemical performance of different types of IPMSCs are summarized, as well as the types and processing techniques of laser processing IPMSC are introduced in detail from four aspects of laser reduction, laser-induced, laser etching and laser sintering.The research progress of laser processing IPMSC in mechanical properties and electrochemical performance is reviewed.The characteristics and challenges of electrolytes used in IPMSC are summarized. Furthermore, based on the technical challenges faced by laser processing IPMSC, the application prospects in wearable and portable electronic devices are prospected.

Key words: energy storage device, in-plane, laser-machined, micro-supercapacitor

中图分类号:

TH165

汤勇, 刘辉龙, 陆龙生, 谢颖熙, 袁伟, 万珍平, 李宗涛, 丁鑫锐. 激光加工平面型微超级电容器的研究进展与发展趋势[J]. 机械工程学报, 2019, 55(4): 189-206.

TANG Yong, LIU Huilong, LU Longsheng, XIE Yingxi, YUAN Wei, WAN Zhenping, LI Zongtao, DING Xinrui. Research Progress and Perspective Trend of Laser-machined In-plane Micro-supercapacitors[J]. Journal of Mechanical Engineering, 2019, 55(4): 189-206.

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激光加工平面型微超级电容器的研究进展与发展趋势

Research Progress and Perspective Trend of Laser-machined In-plane Micro-supercapacitors

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[6]	汤勇, 白石根, 吴耀鹏, 袁伟, 万珍平, 谢颖熙. 高电压微型超级电容器的制造方法及研究进展[J]. 机械工程学报, 2021, 57(22): 305-324.
[7]	赵林杰, 程健, 陈明君, 袁晓东, 廖威, 杨浩, 刘启, 王海军. 熔石英光学元件的CO₂激光加工技术研究新进展[J]. 机械工程学报, 2020, 56(11): 202-218.
[8]	常秋英, 齐烨, 王斌, 乔姣飞. 激光表面织构对45钢干摩擦性能的影响[J]. 机械工程学报, 2017, 53(3): 148-154.
[9]	刘荷辉;虞钢. 汽车模具复杂棱脊和沟槽的数字化及激光加工轨迹规划[J]. , 2004, 40(12): 155-159.
[10]	师汉民. 从外加工拓展到内加工——加工成形技术的一个新的发展动向[J]. , 2003, 39(11): 17-22.
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[12]	张省虞钢. 面向激光加工的自适应测量和神经网络方法[J]. , 2001, 37(5): 60-63.
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