纳米孔阵列加工技术研究进展

doi:10.3901/JME.2020.09.223

机械工程学报 ›› 2020, Vol. 56 ›› Issue (9): 223-233.doi: 10.3901/JME.2020.09.223

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纳米孔阵列加工技术研究进展

张鹏程¹, 温秋玲¹, 姜峰¹, 沈少鑫², 陆静¹

1. 华侨大学制造工程研究院厦门 361021;
2. 华侨大学信息科学与工程学院厦门 361021

收稿日期:2019-05-30 修回日期:2020-01-19 出版日期:2020-05-05 发布日期:2020-05-29
通讯作者: 温秋玲(通信作者),女,1986出生,博士,讲师。主要研究方向为微纳制造及脆性材料的特种加工。E-mail:qlwen@hqu.edu.cn
作者简介:张鹏程,男,1994年出生。主要研究方向为激光微纳加工。E-mail:17013080044@stu.hqu.edu.cn;姜峰,男,1981年出生,博士,教授。主要研究方向为先进制造技术。E-mail:jiangfeng@hqu.edu.cn;沈少鑫,男,1988年出生,博士,讲师。主要研究方向为全息光刻制备二维、三维微纳结构。E-mail:sxshen@hqu.edu.cn;陆静,女,1981年出生,博士,教授。主要研究方向为硬脆材料的高效精密加工。E-mail:lujing26@hqu.edu.cn
基金资助:
国家自然科学基金青年科学基金（51805176）、华侨大学中青年教师科技创新资助计划（ZQN-PY601）、福建省高校新世纪优秀人才支持计划和华侨大学研究生科研创新基金（17013080044）资助项目。

Research Progress in Machining Technology of Nanohole Arrays

ZHANG Pengcheng¹, WEN Qiuling¹, JIANG Feng¹, SHEN Shaoxin², LU Jing¹

1. Institute of Manufacturing Engineering, Huaqiao University, Xiamen 361021;
2. College of Information Science and Engineering, Huaqiao University, Xiamen 361021

Received:2019-05-30 Revised:2020-01-19 Online:2020-05-05 Published:2020-05-29

摘要/Abstract

摘要： 纳米孔阵列在生物检测、传感器、发光器件、光学调制和新能源等领域具有重要的应用。综述了目前几种主流的纳米孔阵列加工技术的基本原理、研究进展、加工效率、加工精度、加工质量、适用范围，并比较了这几种加工方法各自的优势及其局限性。最后指出了纳米孔阵列加工技术当前所面临的挑战和今后的发展方向，以期为大面积纳米孔阵列的高效率、高精度、高质量、低成本制造提供新思路。

关键词: 纳米孔阵列, 阳极氧化法, 激光制孔, 聚焦离子束加工, 电子束加工, 图形复制技术

Abstract: Nanohole arrays have important applications in the fields of biological detection, sensors, light-emitting devices, optical modulation and new energy sources. The basic principles, research status, processing efficiency, accuracy, quality and application range of several mainstream nanohole arrays processing technologies are reviewed, and the advantages and limitations of these processing methods are compared. Finally, the current challenges and future development directions of nanohole arrays processing technology are pointed out in order to provide new processing strategies toward the high efficiency, high precision, high quality and low cost manufacturing of large-area nanohole arrays.

Key words: nanohole arrays, anodic oxidation method, laser drilling, focused ion beam processing, electron beam processing, pattern transfer technology

中图分类号:

TP212

张鹏程, 温秋玲, 姜峰, 沈少鑫, 陆静. 纳米孔阵列加工技术研究进展[J]. 机械工程学报, 2020, 56(9): 223-233.

ZHANG Pengcheng, WEN Qiuling, JIANG Feng, SHEN Shaoxin, LU Jing. Research Progress in Machining Technology of Nanohole Arrays[J]. Journal of Mechanical Engineering, 2020, 56(9): 223-233.

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纳米孔阵列加工技术研究进展

Research Progress in Machining Technology of Nanohole Arrays

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