• CN:11-2187/TH
  • ISSN:0577-6686
纳米孔阵列加工技术研究进展
张鹏程, 温秋玲, 姜峰, 沈少鑫, 陆静
Research Progress in Machining Technology of Nanohole Arrays
ZHANG Pengcheng, WEN Qiuling, JIANG Feng, SHEN Shaoxin, LU Jing
机械工程学报 . 2020, (9): 223 -233 .  DOI: 10.3901/JME.2020.09.223