压电致动器的精密位力自感知方法研究

doi:10.3901/JME.260107

摘要/Abstract

摘要： 降低微纳定位系统的成本以及设计难度，研究压电致动器的精密位力(即输出位移与输出力)自感知方法。首先，根据压电致动器在外力和电压下产生变形，同时压电晶片产生电极化而在其表面形成电荷，进而基于第一类压电基本方程，并考虑压电致动器绝缘电阻与运放偏置电流的影响，提出了能够精密、简便地自感知压电致动器输出位移与输出力的电流积分法。其次，给出影响自感知精度的运放偏置电流、压电致动器绝缘电阻、荷位常数、荷力常数的精密辨识方法，并通过试验进行了相应辨识。最后，试验验证所提出的精密、简便自感知方法的有效性，结果表明所提出的自感知方法不仅具有较高的精度、分辨率以及稳定性，而且能够较好地反映压电致动器输出位移与输出力的蠕变与迟滞特性。

关键词: 压电致动器, 位移自感知, 力自感知, 电流积分, 参数辨识

Abstract: In order to reduce the cost and design difficulty of the micro-nano positioning system, a self-sensing method is used to obtain the output displacement and force of the piezoelectric actuator. First, based on the fact that the piezoelectric actuator deforms under external forces and voltages, while the piezoelectric wafer forms a charge on its surface by generating electrodes, and then based on the first type of piezoelectric fundamental equations and considering the effects of the piezoelectric actuator’s leakage resistance and the operational amplifier’s bias current, the current-integration method is proposed to be able to precisely and conveniently self-perceive the piezoelectric actuator’s output displacements and forces. Secondly, the precise identification methods of op-amp bias current, piezoelectric actuator leakage resistance, charge-displacement coefficient, and charge-force coefficient, which affect the accuracy of self-awareness, are given, and the corresponding identification is carried out through experiments. Finally, the effectiveness of the proposed precise and simple self-perception method is experimentally verified, and the results show that the proposed self-aware method not only has high accuracy, resolution, and stability but also can better reflect the creep and hysteresis characteristics of the output displacement and force of piezoelectric actuators.

Key words: piezoelectric actuators, displacement self-sensing, force self-sensing, current integration, parameter identification

中图分类号:

TH703

王彧, 崔玉国, 杨依领, 崔志英, 毛昊阳, 娄军强. 压电致动器的精密位力自感知方法研究[J]. 机械工程学报, 2026, 62(4): 75-85.

WANG Yu, CUI Yuguo, YANG Yiling, CUI Zhiying, MAO Haoyang, LOU Junqiang. Research on Precision Self-sensing Method for Displacement and Force of Piezoelectric Actuator[J]. Journal of Mechanical Engineering, 2026, 62(4): 75-85.

参考文献

[1] BOTTA F，ROSSI A，BELFIORE N P. A novel method to fully suppress single and bimodal excitations due to the support vibration by means of piezoelectric actuators[J]. Journal of Sound and Vibration，2021，510：116260.
[2] 王亮，舒承有，金家楣，等. 用于驱动履带的夹心式压电作动器的动力学特性[J]. 机械工程学报，2017，53(5)：128-135. WANG Liang，SHU Chengyou，JIN Jiamei，et al. Dynamical characteristics of sandwich-type piezoelectric actuator for driving track[J]. Journal of Mechanical Engineering，2017，53(5)：128-135.
[3] 黄珏皓，娄军强，杨依领. 黏性流体环境中压电宏纤维致动柔性结构的流固耦合振动特性及试验[J]. 机械工程学报，2021，57(22)：376-385. HUANG Juehao，LOU Junqiang，YANG Yiling，et al. Analysis and experiment of fluid-structure coupled vibration of MFC-actuated flexible structure immersed in viscous fluids[J]. Journal of Mechanical Engineering，2021，57(22)：376-385.
[4] LI Zelong，GUAN Chaoliang，DAI Yifan，et al. Comprehensive design method of a high-frequency-response fast tool servo system based on a full-frequency error control algorithm[J]. Micromachines，2021，12(11)：1354.
[5] ZHAO Dongpo，ZHU Zihui，HUANG Peng，et al. Development of a piezoelectrically actuated dual-stage fast tool servo[J]. Mechanical Systems and Signal Processing，2020，144：106873.
[6] LIU Chenyuan，CHEN Fuwen，LI Zhongwei，et al. Three-axial cutting force measurement in micro/nano-cutting by utilizing a fast tool servo with a smart tool holder[J]. CIRP Annals，2021，70(1)：33-36.
[7] YANG Yiling，LOU Junqiang，WU Gaohua. Design and position/force control of an S-shaped MFC microgripper[J] Sensors and Actuators A：Physical，2018，282：63-78.
[8] CHATTARAJ N，GANGUIL R. Effect of self-induced electric displacement field on the response of a piezo-bimorph actuator at high electric field[J]. International Journal of Mechanical Sciences，2017，120：341-348.
[9] 崔玉国，王子宾，马剑强，等. 四自由度压电微夹钳的设计[J]. 机械工程学报，2017，53(23)：165-173. CUI Yuguo，WANG Zibin，MA Jianqiang，et al. Design of a 4-DOF piezoelectric micro-gripper[J]. Journal of Mechanical Engineering，2017，53(23)：165-173.
[10] CHEN Weiwei，WEI Dayu，MEI Yubing，et al. A stick-slip piezoelectric actuator with an integrated sensing unit for the measurement and active control of the contact force[J]. Mechatronics，2023，91：102954.
[11] JANG J，PARK S，HUH J，et al. Design，fabrication，and characterization of piezoelectric single crystal stack actuators based on PMN-PT[J]. Sensors and Actuators A:Physical，2022，342：113617.
[12] 林超，李坪洋，沈忠磊，等. 压电驱动微夹持器特性分析[J]. 仪器仪表学报，2019，40(7)：224-232. LIN Chao，LI Pingyang，SHEN Zhonglei，et al. Characteristic analysis of the micro gripper driven by piezoelectric actuator[J]. Chinese Journal of Scientific Instrument，2019，40(7)：224-232.
[13] WANG Ruijin，WANG Wen，CHEN Zhanfeng，et al. Modeling and compensation for dynamic hysteresis of piezoelectric actuators based on Lissajous Curve[J]. Sensors and Actuators A：Physical，2022，335：113353.
[14] ZHU Zhiwei，TO S，LI Yangmin，et al. External force estimation of a piezo-actuated compliant mechanism based on a fractional order hysteresis model[J]. Mechanical Systems and Signal Processing，2018，110：296-306.
[15] 汪启亮，刘通，李永起，等. 低寄生位移柔性平行微夹持器拓扑优化设计[J]. 中国机械工程，2023，34(21)：2577-2584. WANG Qiliang，LIU Tong，LI Yongqi，et al. Topology optimization design of flexible parallel microgrippers with low parasitic displacements[J]. China Mechanical Engineering，2023，34(21)：2577-2584.
[16] GAO Xiangyu，LIU Jinfeng，XIN Benjian，et al. A bending-bending mode piezoelectric actuator based on PIN-PMN-PT crystal stacks[J]. Sensors and Actuators A：Physical，2021，331：113052.
[17] LIU Yanwei，XU Zhi，LI Xuan，et al. A high-performance stick-slip piezoelectric actuator achieved by using the double-stator cooperative motion mode (DCMM)[J]. Mechanical Systems and Signal Processing，2022，172：108999.
[18] MOUAPI A. Piezoelectric micro generator design and characterization for self-supplying industrial wireless sensor node[J]. Memories-Materials，Devices，Circuits and Systems，2022，1：100002.
[19] SEETHALER R，SEPEHR Z M，MICHAEL G R，et al. Piezoelectric benders with strain sensing electrodes：Sensor design for position control and force estimation[J]. Sensors and Actuators A：Physical，2022，35：113384.
[20] KATSUHIRO S，TAKESHI M. Self-sensing control of piezoelectric positioning stage by detecting permittivity[J]. Sensors and Actuators A：Physical，2015，226：76-80.
[21] AHMADI S，SEETHALER R. On the effect of force，displacement and voltage on the capacitance of piezoelectric stack actuators for self-sensing applications[C]// 20214th International Conference on Mechatronics，Robotics and Automation (ICMRA). Zhanjiang：IEEE，2022：50-54.
[22] MANSOUR S Z，SEERHALER R. Simultaneous quasi-static displacement and force self-sensing of piezoelectric actuators by detecting impedance[J]. Sensors and Actuators A：Physical，2018，274：272-277.
[23] MORTEZA M，SAMI A，MOJTABA G，et al. Charge estimation of piezoelectric actuators：A comparative study[J]. Recent Advances and Future Challenges in Energy Applications and Control of Piezoelectric Actuators，2023，16(10)：3982.
[24] CHEN Y，KAMAL Y. Principle，implementation，and applications of charge control for piezo-actuated nanopositioners：A comprehensive review[J]. Mechanical Systems and Signal Processing，2022，171：108885.
[25] YU Li，CUI Yuguo，YANG Yiling，et al. Implementation and displacement self-sensing of a 4-DOF piezoelectric micromanipulator[J]. Precision Engineering，2024，85：24-39.
[26] 张福学，王丽坤. 现代压电学[M]. 北京：科学出版社，2001. ZHANG Fuxue，WANG Likun. Modern piezoelectricity[M]. Beijing：Science Press，2001.