柔性电涡流传感器的研究现状与发展趋势

doi:10.3901/JME.260510

机械工程学报 ›› 2026, Vol. 62 ›› Issue (14): 32-48.doi: 10.3901/JME.260510

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柔性电涡流传感器的研究现状与发展趋势

李昕¹, 田贵云^2,3, 胡文广⁴, 陆小龙⁵, 梁光波⁵, 林泽森⁶, 李秋锋⁷, 陈杰¹

1. 江西检验检测认证总院特种设备检验检测研究院南昌 330200;
2. 重庆理工大学电气与电子工程学院重庆 400054;
3. 纽卡斯尔大学工程学院纽卡斯尔NE1 7RU英国;
4. 沈阳仪表科学研究院有限公司沈阳 110000;
5. 四川大学机械工程学院成都 610065;
6. 厦门爱德森电子有限公司厦门 361013;
7. 南昌航空大学无损检测教育部重点实验室南昌 330063

收稿日期:2024-11-10 修回日期:2025-10-09 发布日期:2026-08-29
作者简介:李昕，男，1989年出生，博士。主要研究方向为电涡流传感器设计。E-mail：lixin1924@nuaa.edu.cn;田贵云(通信作者)，男，1965年出生，博士，教授，博士研究生导师。主要研究方向为电磁无损检测、结构健康检测。E-mail：g.y.tian@cqut.edu.cn;胡文广，男，1989年出生，硕士，高级工程师。主要研究方向为管道内检测传感器设计。
基金资助:
国家自然科学基金(11202128，12364056，U2230121，U1931126)、中央军委装备发展部慧眼行动(BF28883A)、江西省科技厅03专项及5G(20232ABC03A31)、“兴辽英才计划”带土移植(XLYC2204009)、江西省自然科学基金面上(20252BAC240318)、江西省自然科学基金重点(20253BAC280090)、江西省检验检测认证总院科技(ZYK202506)和江西省市场监督局科技(GSJK202406)资助项目。

The Current Research Status and Development Trends of Flexible Eddy Current Sensors

LI Xin¹, TIAN Guiyun^2,3, HU Wenguang⁴, LU Xiaolong⁵, LIANG Guangbo⁵, LIN Zesen⁶, LI Qiufeng⁷, CHEN Jie¹

1. Institute of special equipment inspection and research, Jiangxi General Institute of Testing and Certification, Nanchang, 330200;
2. School of Electrical and Electronic Engineering, Chongqing University of Technology, Chongqin 400054;
3. School of Engineering, Newcastle University, NE1 7RU, UK;
4. Shenyang Instrument Science Research Institute Co., Ltd Shengyang 110000;
5. School of Mechanical Engineering, Sichuan University Chengdu 610065;
6. Eddysun(Xiamen) Electronic Co., Ltd, Xiamen 361013;
7. Key Laboratory of Nondestructive Testing (Ministry of Education), Nanchang Hangkong University, Nanchang 330063

Received:2024-11-10 Revised:2025-10-09 Published:2026-08-29

摘要/Abstract

摘要： 柔性涡流传感器因其能够紧密贴合构件表面，在检测复杂表面结构和狭缝空间内结构的表面缺陷方面具有显著优势。然而，如何降低误检率、提高灵敏度以及优化传感器性能仍然是柔性涡流传感器检测领域的难点。柔性涡流传感器的研究进展与发展趋势首先被系统梳理，其制造工艺、材料选择及多层结构设计得到重点介绍。随后，对其信号调理方法及在复杂表面结构检测中的应用进行了探讨。最后，商用柔性涡流传感器的技术特点得以阐述。最后，展望了柔性线圈在电涡流传感器应用中面临的挑战，包括线圈尺寸大、高频范围内性能差、线圈机械性能差以及在恶劣环境下自适应能力差等问题，并探讨了应对这些挑战的新工艺、新材料和新方法。

关键词: 柔性线圈, 电涡流传感器, 复杂形状工件, 调理电路

Abstract: Flexible eddy current sensors exhibit significant advantages in detecting surface defects in complex surface structures and narrow spaces due to their ability to conform closely to the surface of components. However, reducing false detection rates, enhancing sensitivity, and optimizing sensor performance remain challenges in the field of flexible eddy current sensor detection. An overview of the current research status and development trends of flexible eddy current sensors is first provided, emphasizing their manufacturing processes, material selection, and multilayer structural designs. This is followed by an exploration of their signal conditioning methods and applications in complex surface structure detection, culminating in a discussion on the technological features of commercial versions. Finally, this study discusses the challenges faced by flexible coils in eddy current sensor applications, including large coil size, poor performance in high-frequency ranges, poor mechanical properties of the coils, and poor adaptability in harsh environments. It also explores new processes, materials, and methods to address these challenges.

Key words: flexible coil, eddy current sensor, complex shape workpiece, conditioning circuit

中图分类号:

TG156

李昕, 田贵云, 胡文广, 陆小龙, 梁光波, 林泽森, 李秋锋, 陈杰. 柔性电涡流传感器的研究现状与发展趋势[J]. 机械工程学报, 2026, 62(14): 32-48.

LI Xin, TIAN Guiyun, HU Wenguang, LU Xiaolong, LIANG Guangbo, LIN Zesen, LI Qiufeng, CHEN Jie. The Current Research Status and Development Trends of Flexible Eddy Current Sensors[J]. Journal of Mechanical Engineering, 2026, 62(14): 32-48.

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链接本文: http://www.cjmenet.com.cn/CN/10.3901/JME.260510

http://www.cjmenet.com.cn/CN/Y2026/V62/I14/32

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柔性电涡流传感器的研究现状与发展趋势

The Current Research Status and Development Trends of Flexible Eddy Current Sensors

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[1]	吴斌;刘秀成;何存富. 兆赫兹纵向模态磁致伸缩传感器的设计及其在钢绞线中的试验研究[J]. , 2011, 47(22): 1-6.
[2]	黄春霞;曹其新;付庄;冷春涛. 晶圆对心转台亚微米级径跳误差补偿方法[J]. , 2008, 44(9): 123-127.
[3]	于亚婷;杜平安;李代生. 电涡流传感器线圈阻抗计算方法[J]. , 2007, 43(2): 210-214.
[4]	陈祥林;丁天怀;黄毅平. 新型接近式柔性电涡流阵列传感器系统[J]. , 2006, 42(8): 150-153.