微加速度传感器研究进展

doi:10.3901/JME.260034

机械工程学报 ›› 2026, Vol. 62 ›› Issue (14): 1-31.doi: 10.3901/JME.260034

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微加速度传感器研究进展

司方成^1,2, 丁洁³, 马鸿梁¹, 何昶¹, 葛庚午¹, 高强¹, 张文栋⁴, 范绪阁¹

1. 北京理工大学前沿交叉科学院北京 100081;
2. 北京理工大学长三角研究院嘉兴 314019;
3. 北京理工大学集成电路与电子学院北京 100081;
4. 中北大学极限环境光电动态测试技术与仪器全国重点实验室太原 030051

收稿日期:2024-12-04 修回日期:2025-08-22 发布日期:2026-08-29
作者简介:司方成，男，2001年出生，硕士研究生。主要研究方向为MEMS传感器及接口电路设计。E-mail：sifangcheng@bit.edu.cn;丁洁，女，1986年出生，博士，副教授，博士研究生导师。主要研究方向为新型半导体器件的建模与仿真，CMOS器件、闪存器件的随机涨落与可靠性，设计与工艺协同优化方法(DTCO)，传感器器件的建模仿真与机理。E-mail：jie.ding@bit.edu.cn;张文栋，男，1962年出生，博士，教授，博士研究生导师。主要研方向为动态测试和微米纳米技术。E-mail：wdzhang@nuc.edu.cn;范绪阁，男，1985年出生，博士，教授，博士研究生导师。主要研究方向为微纳机电系统(MEMS/NEMS)、微纳传感器、石墨烯等二维材料等。E-mail：xgfan@bit.edu.cn
基金资助:
国家自然科学基金面上(62171037)、173技术领域基金(2023-JCJQ-JJ-0971)、国家重点研发计划(2022YFB3204600)、北京市自然科学基金(4232076)、国家自然科学基金优秀青年基金(海外)、北京理工大学特立青年学者人才支持启动计划(2021TLQT012)和北京理工大学科技创新计划原创基础前沿交叉学科创新专项计划资助项目。

Recent Advances of Micro-accelerometers

SI Fangcheng^1,2, DING Jie³, MA Hongliang¹, HE Chang¹, GE Gengwu¹, GAO Qiang¹, ZHANG Wendong⁴, FAN Xuge¹

1. School of Interdisciplinary Science, Beijing Institute of Technology, Beijing 100081;
2. Yangtze Delta Region Academy of Beijing Institute of Technology, Jiaxing 314019;
3. School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081;
4. State key Laboratory of Extreme Environment Optoelectronic Dynamic Measurement Technology and Instrument, North University of China, Taiyuan 030051

Received:2024-12-04 Revised:2025-08-22 Published:2026-08-29

摘要/Abstract

摘要： 微加速度传感器利用MEMS/NEMS系统集成技术，与CMOS工艺兼容，可以将换能器、信号处理电路集成在一个芯片上。在微观尺寸内，该类传感器因比例尺度定律可以获得优异的物理特性。同时，该类传感器也继承了传统机械结构的研发经验，并且可以创造性地结合新型材料、新工艺，具有广阔的发展前景。伴随着集成电路微加工技术和超精密机械加工技术的发展，微纳机电技术及测量技术已经成为了当今的研究热点之一。首先简述微加速度传感器的应用背景，其次对各种微加速度传感器的发展及其近期研究情况进行综述，介绍微加速度传感器的结构特点、基本参数、性能特点及其测试方法。针对当前加速度传感器面临的技术难题，介绍石墨烯等新型敏感材料在微加速度传感器的应用。最后，对微加速度传感器的发展进行了展望。

关键词: MEMS, 加速度传感器, 石墨烯, 二维材料

Abstract: The micro-accelerometer utilizes MEMS/NEMS integration technology, compatible with CMOS technology, and enables to integrate transducer and signal processing circuit on one single chip. At microscopic scale, this kind of sensor can obtain excellent physical properties due to the law of proportional scale. Additionally, this kind of sensor is also based on the research and development experience of traditional mechanical structure, and can creatively combine new materials and new process, which provides broad development prospects. With the development of integrated circuit micro-processing technology and ultra-precision mechanical processing technology, MEMS and NEMS technology and related measurement technology have become one of the research highlights. The application background of the micro-accelerometer is briefly described, and then the development and recent research status of various types of micro-accelerometers are reviewed. The structural characteristics, basic parameters, performance characteristics and measurement methods of micro-accelerometers are discussed. In view of the technical challenges faced by the current accelerometers, the potential application of new sensitive materials such as graphene in micro-accelerometers is provided and discussed. Finally, an outlook on the development of micro-accelerometers is provided.

Key words: MEMS, accelerometer, graphene, two-dimensional materials

中图分类号:

TH122

司方成, 丁洁, 马鸿梁, 何昶, 葛庚午, 高强, 张文栋, 范绪阁. 微加速度传感器研究进展[J]. 机械工程学报, 2026, 62(14): 1-31.

SI Fangcheng, DING Jie, MA Hongliang, HE Chang, GE Gengwu, GAO Qiang, ZHANG Wendong, FAN Xuge. Recent Advances of Micro-accelerometers[J]. Journal of Mechanical Engineering, 2026, 62(14): 1-31.

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微加速度传感器研究进展

Recent Advances of Micro-accelerometers

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