半球谐振子关键性能及制造工艺研究新进展

doi:10.3901/JME.2024.03.354

机械工程学报 ›› 2024, Vol. 60 ›› Issue (3): 354-372.doi: 10.3901/JME.2024.03.354

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半球谐振子关键性能及制造工艺研究新进展

马传震^1,2, 刘赫男^1,2, 陈明君², 田金川², 周子涵², 孙建刚², 秦彪²

1. 哈尔滨工业大学机器人技术与系统国家重点实验室哈尔滨 150001;
2. 哈尔滨工业大学机电工程学院哈尔滨 150001

收稿日期:2023-03-01 修回日期:2023-08-11 出版日期:2024-02-05 发布日期:2024-04-28
通讯作者: 陈明君,男,1971年出生,博士,教授,博士研究生导师。主要研究方向为超精密加工、先进制造技术及微纳米制造技术。E-mail:chenmj@hit.edu.cn
作者简介:马传震,男, 1996 年出生,博士研究生。主要研究方向为超精密加工及先进制造技术。E-mail:machuanzhen@126.com;刘赫男,男, 1989 年出生,博士,副研究员,硕士研究生导师。主要研究方向为超精密加工及先进制造技术。E-mail:liuhn@hit.edu.cn
基金资助:
国家重点研发计划(2022YFB3403600)和机器人技术与系统国家重点实验室(哈尔滨工业大学)自主研究课题(SKLRS202204C)资助项目。

Research Progress on Key Property and Manufacturing Technology of Hemispherical Resonator

MA Chuanzhen^1,2, LIU Henan^1,2, CHEN Mingjun², TIAN Jinchuan², ZHOU Zihan², SUN Jiangang², QIN Biao²

1. State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin 150001;
2. School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001

Received:2023-03-01 Revised:2023-08-11 Online:2024-02-05 Published:2024-04-28

摘要/Abstract

摘要： 半球谐振陀螺具有结构简单、精度高、可靠性高、工作寿命长等特性,在国防军事、通信卫星、载人航天、天文观测、海洋工程等领域具有重大应用场景。半球谐振子作为半球谐振陀螺仪的核心器件,其加工质量直接影响半球谐振子的频率裂解和品质因数, 进而影响半球谐振陀螺仪的工作精度和使用寿命, 因此非常有必要对半球谐振子的性能及制造工艺进行研究。主要从半球谐振陀螺仪工作原理和研究历程、半球谐振子的频率裂解和品质因数、半球谐振子的制造工艺三个方面进行综述,重点分析了半球谐振子的频率裂解与品质因数的研究方法和最新进展以及半球谐振子的超精密磨削工艺和抛光工艺,并探讨分析了其在发展过程中面临的挑战和仍需要解决的问题,希望为后续精确计算、测量半球谐振子的频率裂解和品质因数,改进半球谐振子的制造工艺,提高半球谐振陀螺仪的导航精度提供参考。

关键词: 半球谐振子, 频率裂解, 品质因数, 制造工艺

Abstract: Since hemispherical resonator gyroscope (HRG) is characterized with simple structure, high accuracy, high reliability, and long service life, the potential applications of HRG are becoming increasing widespread, including national defense, communication satellite, human spaceflight, astronomical observation, ocean engineering, etc. As the hemispherical resonator is core component of HRG, the processing quality of resonator directly determines the frequency splitting and quality factor of the hemispherical resonator, which then affects the working accuracy and service life of HRG. Therefore, investigating the key properties and manufacturing technology of hemispherical resonator is of great necessity. The working principle and research history of HRG, the frequency splitting and quality factor of hemispherical resonator, and the manufacturing process of hemispherical resonator are reviewed. The research methods and latest progress in frequency splitting and quality factor, the hemispherical resonator ultra-precision grinding and magnetorheological polishing process are emphatically analyzed. What's more, the challenges and problems still to be solved in the course of future development are discussed. By summarizing what is mentioned above, references are provided for subsequent works, such as accurate calculation and measurement of the frequency splitting and quality factor of hemispherical resonator, the optimization of hemispherical resonator manufacturing process, and the improvement of HRG navigation accuracy.

Key words: hemispherical resonator, frequency splitting, quality factor, manufacturing technology

中图分类号:

TG156

马传震, 刘赫男, 陈明君, 田金川, 周子涵, 孙建刚, 秦彪. 半球谐振子关键性能及制造工艺研究新进展[J]. 机械工程学报, 2024, 60(3): 354-372.

MA Chuanzhen, LIU Henan, CHEN Mingjun, TIAN Jinchuan, ZHOU Zihan, SUN Jiangang, QIN Biao. Research Progress on Key Property and Manufacturing Technology of Hemispherical Resonator[J]. Journal of Mechanical Engineering, 2024, 60(3): 354-372.

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半球谐振子关键性能及制造工艺研究新进展

Research Progress on Key Property and Manufacturing Technology of Hemispherical Resonator

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