基于高通量磁控共溅射技术的非晶合金纳米摩擦学性能研究

doi:10.3901/JME.2024.15.185

机械工程学报 ›› 2024, Vol. 60 ›› Issue (15): 185-193.doi: 10.3901/JME.2024.15.185

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基于高通量磁控共溅射技术的非晶合金纳米摩擦学性能研究

曾鑫¹, 赖建平¹, 王驰¹, 袁小虎^2,3, 李丁骏^2,3, 余家欣¹

1. 西南科技大学制造过程测试技术教育部重点实验室绵阳 621010;
2. 长寿命高温材料国家重点实验室德阳 618000;
3. 东方电气集团东方汽轮机有限公司德阳 618000

收稿日期:2023-08-01 修回日期:2023-12-11 出版日期:2024-08-05 发布日期:2024-09-24
作者简介:曾鑫，男，1998年出生。主要研究方向为纳米摩擦学。E-mail：zengxin2016@outlook.com
王驰，男，1998年出生。主要研究方向为纳米摩檫学。E-mail：prowccnov@163.com
余家欣(通信作者)，男，1982年出生，博士，教授，博士研究生导师。主要研究方向为摩擦学与超精密加工。E-mail：yujiaxin@swust.edu.cn
基金资助:
国家自然科学基金(51975492)和西南科技大学自然科学基金(19xz7163)资助项目。

Investigation on Nano-tribological Properties of Amorphous Alloys Based on High-throughput Co-sputtering Method

ZENG Xin¹, LAI Jianping¹, WANG Chi¹, YUAN Xiaohu^2,3, LI Dingjun^2,3, YU Jiaxin¹

1. Key Laboratory of Testing Technology for Manufacturing Process, Ministry of Education, Southwest University of Science and Technology, Mianyang 621010;
2. State Key Laboratory of Long-life High Temperature Materials, Deyang 618000;
3. Dongfang Electric Corporation Dongfang Turbine Co., Ltd, Deyang 618000

Received:2023-08-01 Revised:2023-12-11 Online:2024-08-05 Published:2024-09-24

摘要/Abstract

摘要： 采用高通量磁控共溅射技术，制备了含不同成分的Pd-W-Si非晶合金库。采用纳米压痕、纳米划痕实验，探究了压入硬度(H)和弹性模量(E)对该非晶合金体系纳米摩擦学性能的影响。研究发现：(1)随着压入硬度和弹性模量的增大，划入深度(h_s)整体呈相似的减小趋势，但相比于硬度，该趋势与弹性模量的关联性更强，即弹性模量更能反映非晶合金的抗划性能。这是因为剪切转变区(Shear transformation zone，STZ)体积与硬度、弹性模量均呈负相关，但STZ体积随弹性模量的变化具有比硬度更弱的波动性。弹性模量较大的非晶合金内部STZ体积越小，非晶结构中的变形单元越不容易被激活，在同载荷下的划入深度越浅，抗划性能越好；(2)弹性回复率(η)与硬度的关联性较弱，但与H/E的关联性较强，表现为弹性回复率随H/E的增大而增加。这是因为H/E值越大的非晶合金弹性吸收的能量越多，更容易发生弹性回复；此外，非晶合金的pile-up高度随着H/E值的增加而减小的现象，也在一定程度上促进了剪切带的自由滑动，从而促进材料弹性回复。这两方面因素综合致使高H/E值的非晶合金具有更高的弹性回复率和更好的耐磨性。

关键词: 高通量, 非晶合金, 纳米摩擦学, 硬度, 弹性模量

Abstract: A Pd-W-Si amorphous alloy library with different compositions is prepared by a high-throughput method based on magnetron co-sputtering. The effects of indentation hardness (H) and elastic modulus (E) on the nano-tribological properties of the amorphous alloys are investigated by experiments of nanoindentation and nanoscratch. It is found that: (1) although the scratch depth (h_s) follows a decreasing trend with increasing hardness and elastic modulus, the matching degree of data points with the trend line is stronger for elastic modulus as compared with hardness, which can be rationalized by the volume of shear transformation zone (STZ) that suggests the more difficult activation of the deformed unit in amorphous structure and thus the better scratching resistance: for the alloy with large H and E, the STZ volume is estimated to be small, resulting in a shallow scratch depth and high scratch resistance, while the fluctuation of STZ volume with E is weaker than H. (2) The correlation of elastic recovery (η) is weak with hardness but strong with H/E. In particular, the elastic recovery increases with H/E. This is because, for the alloy with high H/E, the energy absorbed in an elastically deformed regime is more and the material after elastic-plastic deformation is easier to recover; the phenomenon that the pile-up height of amorphous alloy decreases with H/E also promotes the free slipping of shear bands to a certain extent, thus leading to higher elastic recovery and better wear resistance.

Key words: high-throughput, amorphous alloy, nano-tribology, hardness, elastic modulus

中图分类号:

TH117

曾鑫, 赖建平, 王驰, 袁小虎, 李丁骏, 余家欣. 基于高通量磁控共溅射技术的非晶合金纳米摩擦学性能研究[J]. 机械工程学报, 2024, 60(15): 185-193.

ZENG Xin, LAI Jianping, WANG Chi, YUAN Xiaohu, LI Dingjun, YU Jiaxin. Investigation on Nano-tribological Properties of Amorphous Alloys Based on High-throughput Co-sputtering Method[J]. Journal of Mechanical Engineering, 2024, 60(15): 185-193.

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基于高通量磁控共溅射技术的非晶合金纳米摩擦学性能研究

Investigation on Nano-tribological Properties of Amorphous Alloys Based on High-throughput Co-sputtering Method

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