激光诱导微纳连接技术研究进展

doi:10.3901/JME.2022.02.088

摘要/Abstract

摘要： 随着航空、电子以及能源技术的发展，以低维度纳米材料为功能单元的复杂电子设备和系统趋向于柔性化和微型化，这一过程依赖于纳米材料间的高质量连接。微纳材料自身的尺寸及结构限制使得传统的热退火、机压成型、化学处理和电子束辐照等方法难以在构筑有效连接的同时避免非连接区域的损伤，而激光加工则由于其聚焦光斑尺寸小，单色性好和便于精确控制能量输入等优势得到广泛关注。为阐明激光在微纳连接领域的实际应用意义和潜在应用前景，首先分析超快激光和常规激光在微纳连接形成过程中与材料的瞬态作用机制，在此基础上详细综述了零维纳米颗粒、一维纳米线、二维纳米薄膜以及混合维度材料的激光连接策略，同时介绍了纳米材料连接后获得的网状结构在透明电极中的应用。最后，针对当前激光微纳连接技术存在的不足进行分析，并对今后的发展进行了展望。

关键词: 激光, 微纳连接, 纳米颗粒, 纳米线, 纳米薄膜, 透明电极

Abstract: With the development of aviation, electronics and energy technologies, complex electronic devices and systems with low-dimensional nanomaterials as functional units tend to be flexible and miniaturized, and this process depends on the high-quality connections between nanomaterials. The size and structure limitations of micro-nano materials make it difficult for traditional methods such as thermal annealing, mechanical pressing, chemical treatment and electron beam irradiation to avoid the damage of non-joining areas while constructing effective joining. However, laser processing has been widely concerned because of its advantages such as small focal spot size, good monochromaticity and easy accurate control of energy input. In order to clarify the practical application significance and potential application prospect of laser in micro-nano connection field, firstly analyzes the transient interaction mechanism between ultrafast laser and conventional laser in the formation of micro-nano joining, and then summarizes in detail the laser joining strategies of zero-dimensional nanoparticles, one-dimensional nano-wires, two-dimensional nano-films and mixed-dimensional materials, and introduces the application of the network structure obtained by connecting nano-materials in transparent electrodes. Finally, the shortcomings of the current laser micro-nano connection technology are analyzed, and the future development is prospected.

Key words: laser, micro-nano joining, nanoparticles, nanowires, nano membranes, transparent electrode

中图分类号:

TN249

王联甫, 丁烨, 王根旺, 管延超, 王扬, 杨立军. 激光诱导微纳连接技术研究进展[J]. 机械工程学报, 2022, 58(2): 88-99.

WANG Lianfu, DING Ye, WANG Genwang, GUAN Yanchao, WANG Yang, YANG Lijun. Research Advances of Laser-induced Micro-nano Joining Technology[J]. Journal of Mechanical Engineering, 2022, 58(2): 88-99.

参考文献

[1] HAN S,HONG S,HAM J,et al. Fast plasmonic laser nanowelding for a Cu-nanowire percolation network for flexible transparent conductors and stretchable electronics[J]. Advanced Materials,2014,26(33):5808-5814.
[2] ZACHARATOS F,KARVOUNIS P,THEODORAKOS I,et al. Single step laser transfer and laser curing of Ag nanowires:A digital process for the fabrication of flexible and transparent microelectrodes[J]. Materials,2018,11(6):1036.
[3] XING S,LIN L,ZOU G,et al. Two-photon absorption induced nanowelding for assembling ZnO nanowires with enhanced photoelectrical properties[J]. Applied Physics Letters,2019,115(10):103101.
[4] KERAMATNEJAD K,ZHOU Y S,LI D W,et al. Laser-assisted nanowelding of graphene to metals:An optical approach toward ultralow contact resistance[J]. Advanced Materials Interfaces,2017,4(15):1700294.
[5] LIN L,LIU L,MUSSELMAN K,et al. Plasmonic-radiation-enhanced metal oxide nanowire heterojunctions for controllable multilevel memory[J]. Advanced Functional Materials,2016,26(33):5979-5986.
[6] SONG T B,RIM Y S,LIU F,et al. Highly robust silver nanowire network for transparent electrode[J]. ACS Applied Materials & Interfaces,2015,7(44):24601-24607.
[7] TOKUNO T,NOGI M,KARAKAWA M,et al. Fabrication of silver nanowire transparent electrodes at room temperature[J]. Nano Research,2011,4(12):1215-1222.
[8] LIANG X,ZHAO T,ZHU P,et al. Room-temperature nanowelding of a silver nanowire network triggered by hydrogen chloride vapor for flexible transparent conductive films[J]. ACS Applied Materials & Interfaces,2017,9(46):40857-40867.
[9] LEE S J,LEE Y B,LIM Y R,et al. High energy electron beam stimulated nanowelding of silver nanowire networks encapsulated with graphene for flexible and transparent electrodes[J]. Scientific Reports,2019,9(1):1-8.
[10] LIU Y,ZHANG J,GAO H,et al. Capillary-force-induced cold welding in silver-nanowire-based flexible transparent electrodes[J]. Nano Letters,2017,17(2):1090-1096.
[11] ZHANG H,WANG S,TIAN Y,et al. Electrodeposition fabrication of Cu@Ni core shell nanowire network for highly stable transparent conductive films[J]. Chemical Engineering Journal,2020,390:124495.
[12] CHUNG W H,PARK S H,JOO S J,et al. UV-assisted flash light welding process to fabricate silver nanowire/graphene on a PET substrate for transparent electrodes[J]. Nano Research,2018,11(4):2190-2203.
[13] JANG Y R,CHUNG W H,HWANG Y T,et al. Selective wavelength plasmonic flash light welding of silver nanowires for transparent electrodes with high conductivity[J]. ACS Applied Materials & Interfaces,2018,10(28):24099-24107.
[14] LIN L,LIU L,PENG P,et al. In situ nanojoining of Y- and T-shaped silver nanowires structures using femtosecond laser radiation[J]. Nanotechnology,2016,27(12):125201.
[15] von der LINDE D,SOKOLOWSKI-TINTEN K,BIALKOWSKI J. Laser-solid interaction in the femtosecond time regime[J]. Applied Surface Science,1997,109:1-10.
[16] LIN L,ZOU G,LIU L,et al. Plasmonic engineering of metal-oxide nanowire heterojunctions in integrated nanowire rectification units[J]. Applied Physics Letters,2016,108(20):203107.
[17] SOKOLOWSKI-TINTEN K,BIALKOWSKI J,von der LINDE D. Ultrafast laser-induced order-disorder transitions in semiconductors[J]. Physical Review B,1995,51(20):14186.
[18] CHENG J,LIU C S,SHANG S,et al. A review of ultrafast laser materials micromachining[J]. Optics & Laser Technology,2013,46:88-102.
[19] YU H,LI X,HAO Z,et al. Fabrication of metal/semiconductor nanocomposites by selective laser nano-welding[J]. Nanoscale,2017,9(21):7012-7015.
[20] PENG P,LIU L,GERLICH A P,et al. Self-oriented nanojoining of silver nanowires via surface selective activation[J]. Particle & Particle Systems Characterization,2013,30(5):420-426.
[21] LIU L,HUANG H,HU A,et al. Nano brazing of Pt-Ag nanoparticles under femtosecond laser irradiation[J]. Nano-Micro Letters,2013,5(2):88-92.
[22] HUANG H,LIU L,PENG P,et al. Controlled joining of Ag nanoparticles with femtosecond laser radiation[J]. Journal of Applied Physics,2012,112(12):123519.
[23] 廖嘉宁,王欣达,周兴汶,等. 铜纳米颗粒的飞秒激光连接过程研究[J]. 中国激光,2021,48(8):0802008. LIAO Jianing,WANG Xinda,ZHOU Xingwen,et al. Joining process of copper nanoparticles with femtosecond laser irradiation[J]. Chinese Journal of Lasers,2021,48(8):0802008.
[24] 侯超剑,王根旺,王扬,等. 激光熔融SiO₂基底上银纳米颗粒分子动力学仿真[J]. 中国激光,2021,48(8):0802025. HOU Chaojian,WANG Genwang,WANG Yang,et al. Molecular dynamics simulation of laser melting of sliver nanoparticles on SiO₂ substrate[J]. Chinese Journal of Lasers,2021,48(8):0802025.
[25] GARNETT E C,CAI W,CHA J J,et al. Self-limited plasmonic welding of silver nanowire junctions[J]. Nature Materials,2012,11(3):241-249.
[26] HA J,LEE B J,HWANG D J,et al. Femtosecond laser nanowelding of silver nanowires for transparent conductive electrodes[J]. Rsc Advances,2016,6(89):86232-86239.
[27] PENG Y,CULLIS T,INKSON B J N L. Bottom-up nanoconstruction by the welding of individual metallic nanoobjects using nanoscale solder[J]. Nano Letters,2009,9(1):91-96.
[28] LI Q,LIU G,YANG H,et al. Optically controlled local nanosoldering of metal nanowires[J]. Applied Physics Letters,2016,108(19):193101.
[29] XIAO M,LIN L,XING S,et al. Nanojoining and tailoring of current-voltage characteristics of metal-P type semiconductor nanowire heterojunction by femtosecond laser irradiation[J]. Journal of Applied Physics,2020,127(18):184901.
[30] LIU G,LI Q,QIU M. Sacrificial solder based nanowelding of ZnO nanowires[C]//Journal of Physics:Conference Series,2016,680(1):012027.
[31] CHAKRAVARTY D,TIWARY C S,WOELLNER C F,et al. 3D Porous graphene by low-temperature plasma welding for bone implants[J]. Advanced Materials,2016,28(40):8959-8967.
[32] ZOU R,ZHANG Z,XU K,et al. A method for joining individual graphene sheets[J]. Carbon,2012,50(13):4965-4972.
[33] WU X,ZHAO H,ZHONG M,et al. The formation of molecular junctions between graphene sheets[J]. Materials Transactions,2013,54(6):940-946.
[34] YE X,HUANG T,LIN Z,et al. Lap joining of graphene flakes by current-assisted CO₂ laser irradiation[J]. Carbon,2013,61:329-335.
[35] DENG Y,BAI Y,YU Y,et al. Laser nanojoining of copper nanowires[J]. Journal of Laser Applications,2019,31(2):022414.
[36] 孙天鸣,肖宇,霍金鹏,等. 飞秒激光辐照连接金属氧化物纳米线及电性能调控[J]. 中国激光,2021,48(8):0802006 SUN Tianming,XIAO Yu,HUO Jinpeng,et al. Nanojoining and electrical performance modulation of metal oxide nanowires based on femtosecond laser irradiation[J]. Chinese Journal of Lasers,2021,48(8):0802006
[37] XING S,LIN L,ZOU G,et al. Improving the electrical contact at a Pt/TiO₂ nanowire interface by selective application of focused femtosecond laser irradiation[J]. Nanotechnology,2017,28(40):405302.
[38] OH J S,KIM S H,HWANG T,et al. Laser-assisted simultaneous patterning and transferring of graphene[J]. The Journal of Physical Chemistry C,2013,117(1):663-668.
[39] CHOI H,NGUYEN P T,IN J B. Laser transmission welding and surface modification of graphene film for flexible supercapacitor applications[J]. Applied Surface Science,2019,483:481-488.
[40] ERMAKOV V A,ALAFERDOV A V,VAZ A R,et al. Nonlocal laser annealing to improve thermal contacts between multi-layer graphene and metals[J]. Nanotechnology,2013,24(15):155301.
[41] BADE S G R,SHAN X,HOANG P T,et al. Stretchable light-emitting diodes with organometal-halide- perovskite-polymer composite emitters[J]. Advanced Materials,2017,29(23):1607053.
[42] LIPOMI D J,VOSGUERITCHIAN M,TEE B C,et al. Skin-like pressure and strain sensors based on transparent elastic films of carbon nanotubes[J]. Nature Nanotechnology,2011,6(12):788-792.
[43] BAE S,KIM H,LEE Y,et al. Roll-to-roll production of 30-inch graphene films for transparent electrodes[J]. Nature Nanotechnology,2010,5(8):574-578.
[44] LEMASTERS R,ZHANG C,MANJARE M,et al. Ultrathin wetting layer-free plasmonic gold films[J]. ACS Photonics,2019,6(11):2600-2606.
[45] MIAO J,CHEN S,LIU H,et al. Low-temperature nanowelding ultrathin silver nanowire sandwiched between polydopamine-functionalized graphene and conjugated polymer for highly stable and flexible transparent electrodes[J]. Chemical Engineering Journal,2018,345:260-270.
[46] JIANG Z,FUKUDA K,XU X,et al. Reverse-offset printed ultrathin Ag mesh for robust conformal transparent electrodes for high-performance organic photovoltaics[J]. Advanced Materials,2018,30(26):1707526.
[47] JIN W Y,GINTING R T,KO K J,et al. Ultra-smooth,fully solution-processed large-area transparent conducting electrodes for organic devices[J]. Scientific Reports,2016,6(1):1-10.
[48] KANG H,JUNG S,JEONG S,et al. Polymer-metal hybrid transparent electrodes for flexible electronics[J]. Nature Communications,2015,6(1):1-7.
[49] MO L,RAN J,YANG L,et al. Flexible transparent conductive films combining flexographic printed silver grids with CNT coating[J]. Nanotechnology,2016,27(6):065202.
[50] EMMOTT C J M,URBINA A,NELSON J. Environmental and economic assessment of ITO-free electrodes for organic solar cells[J]. Solar Energy Materials and Solar Cells,2012,97:14-21.
[51] YE S,RATHMELL A R,CHEN Z,et al. Metal nanowire networks:The next generation of transparent conductors[J]. Advanced Materials,2014,26(39):6670-6687.
[52] NOH J,KIM D. Laser shock pressing of silver nanowires on flexible substrates to fabricate highly uniform transparent conductive electrode films[J]. Nanotechnology,2021, 32(15):155303.
[53] LEE J,LEE P,LEE H,et al. Very long Ag nanowire synthesis and its application in a highly transparent,conductive and flexible metal electrode touch panel[J]. Nanoscale,2012,4(20):6408-6414.
[54] HENLEY S J,CANN M,JUREWICZ I,et al. Laser patterning of transparent conductive metal nanowire coatings:Simulation and experiment[J]. Nanoscale,2014,6(2):946-952.
[55] SOPENA P,SERRA P,FERNANDEZ-PRADAS J M. Transparent and conductive silver nanowires networks printed by laser-induced forward transfer[J]. Applied Surface Science,2019,476:828-833.
[56] TRAN N H,DUONG T H,KIM H C. A fast fabrication of copper nanowire transparent conductive electrodes by using pulsed laser irradiation[J]. Scientific Reports,2017,7(1):1-9.
[57] TRAN N H,HOANG H M,DUONG T H,et al. Using a nanosecond laser to pattern copper nanowire-based flexible electrodes:From simulation to practical application[J]. Applied Surface Science,2020,520:146216.
[58] WANG J,CHEN H,ZHAO Y,et al. Programmed ultrafast scan welding of Cu nanowire networks with a pulsed ultraviolet laser beam for transparent conductive electrodes and flexible circuits[J]. ACS Applied Materials & Interfaces,2020,12(31):35211-35221.