激光直写制造石墨烯基柔性电子器件的研究进展

doi:10.3901/JME.2021.21.234

机械工程学报 ›› 2021, Vol. 57 ›› Issue (21): 234-247.doi: 10.3901/JME.2021.21.234

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激光直写制造石墨烯基柔性电子器件的研究进展

陆龙生^1,2, 王文涛^1,2, 谢颖熙^1,2, 汤勇^1,2

1. 华南理工大学机械与汽车工程学院广州 510640;
2. 华南理工大学广东省功能结构与器件智能制造工程实验室广州 510640

收稿日期:2020-12-21 修回日期:2021-03-18 出版日期:2021-11-05 发布日期:2021-12-28
通讯作者: 谢颖熙(通信作者),男,1989年出生,博士,副教授。主要研究方向为碳基材料微纳米加工、激光加工和微超级电容器。E-mail:xieyingxi@scut.edu.cn
作者简介:陆龙生,男,1981年出生,博士,教授,博士研究生导师。主要研究方向为表面微纳功能结构制造。E-mail:meluls@scut.edu.cn;王文涛,男,1993年出生,博士研究生。主要研究方向为激光加工和柔性电子器件制造。E-mail:wangwentao@scut.edu.cn;汤勇,男,1962年出生,博士,教授,博士研究生导师。主要研究方向为微制造、表面功能结构制造。E-mail:ytang@scut.edu.cn
基金资助:
国家自然科学基金资助项目（51775197）。

Recent Advances in the Fabrication of Graphene-based Flexible Electronic Devices by Laser Direct Writing

LU Longsheng^1,2, WANG Wentao^1,2, XIE Yingxi^1,2, TANG Yong^1,2

1. School of Mechanical and Automotive Engineering, South China University of Technology, Guangzhou 510640;
2. Intelligent Manufacturing Engineering Laboratory of Functional Structure and Devices in Guangdong Province, South China University of Technology, Guangzhou 510640

Received:2020-12-21 Revised:2021-03-18 Online:2021-11-05 Published:2021-12-28

摘要/Abstract

摘要： 柔性电子器件相对于传统电子器件，拥有独特的柔性和延展性，能够在一定程度上适应不同的工作环境，满足设备的形变需求。石墨烯是开发柔性电子器件的理想材料。然而，传统的石墨烯加工技术大多涉及高温和化学溶剂，存在着成本高，工艺线路复杂和环境污染等问题，并不适合未来产业发展。激光直写（Laser direct writing，LDW）技术具有加工速度快，扫描面积大和空间分辨率高等优点，且无需掩模和后处理，在现代工业中广泛应用。最新研究表明，激光直写技术可以从氧化石墨烯、多种聚合物甚至天然材料中衍生出石墨烯，这无疑进一步提升了石墨烯基柔性电子器件的应用潜力。本文对现有激光直写技术制备石墨烯的前驱体进行了归纳分类，并详细介绍了相应的演变过程、加工原理及辅助加工设备，总结了基底转印、表面应变结构、剪纸拓扑结构这三种常见的柔性化制造策略，并重点阐述了其在超级电容器、传感器、纳米发电机和致动器等石墨烯基柔性电子器件中的最新应用，最后对其发展趋势及挑战进行讨论。

关键词: 激光直写, 石墨烯, 柔性电子器件, 制造方法

Abstract: Compared with traditional electronic devices, flexible electronic devices have unique flexibility and ductility, which can adapt to different working condition and meet the deformation needs of equipment. Graphene is an ideal material for developing flexible electronic devices. However, traditional graphene processing technologies often involve high temperature and chemical solvents, require high-cost, complicated technical routes and environmental pollution, which are not suitable for future development. Laser direct writing (LDW) technology does not require masks and post-processing, and has the advantages of fast processing speed, large scanning area, and high spatial resolution. Therefore, it has been widely used in modern industry. Recent research showed that LDW can produce graphene from a variety of polymers and even natural materials, which undoubtedly further enhances the potential of graphene in flexible electronic devices. In this work, the precursors of graphene prepared by LDW are summarized, and the corresponding evolution process, processing principle and auxiliary processing equipment are introduced in detail. The huge advances in the design and manufacture of flexible electronic devices by the three strategies of transfer process, strain-accommodating engineering and Kirigami-inspired structure, and their latest applications in supercapacitors, sensors, nanogenerators and actuators are summarized. Furthermore, the development trend and challenges are discussed.

Key words: laser direct writing, graphene, flexible electronic devices, manufacturing method

中图分类号:

TH165

陆龙生, 王文涛, 谢颖熙, 汤勇. 激光直写制造石墨烯基柔性电子器件的研究进展[J]. 机械工程学报, 2021, 57(21): 234-247.

LU Longsheng, WANG Wentao, XIE Yingxi, TANG Yong. Recent Advances in the Fabrication of Graphene-based Flexible Electronic Devices by Laser Direct Writing[J]. Journal of Mechanical Engineering, 2021, 57(21): 234-247.

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激光直写制造石墨烯基柔性电子器件的研究进展

Recent Advances in the Fabrication of Graphene-based Flexible Electronic Devices by Laser Direct Writing

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