微半球振动陀螺的装配误差分析与精密微调机构设计

doi:10.3901/JME.2020.13.077

机械工程学报 ›› 2020, Vol. 56 ›› Issue (13): 77-83.doi: 10.3901/JME.2020.13.077

• 特邀专栏：微纳能源与传感 • 上一篇下一篇

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微半球振动陀螺的装配误差分析与精密微调机构设计

席翔, 肖定邦, 李微, 卢坤, 石岩, 袁超, 吴学忠

国防科技大学智能科学学院长沙 410073

收稿日期:2019-08-12 修回日期:2019-10-12 出版日期:2020-07-05 发布日期:2020-08-01
通讯作者: 肖定邦(通信作者),男,1983年出生,博士,教授,博士研究生导师。主要研究方向为惯性传感器和微机电系统。E-mail:dingbangxiao@nudt.edu.cn
作者简介:席翔,男,1986年出生,博士,副研究员。主要研究方向为壳体振动陀螺和精密加工。E-mail:xixiang@nudt.edu.cn
基金资助:
国家自然科学基金资助项目（51935013）。

Analysis of Assembly Errors and Design of Precise Micro-regulator for Micro-hemispherical Resonator Gyroscope (mHRG)

XI Xiang, XIAO Dingbang, LI Wei, LU Kun, SHI Yan, YUAN Chao, WU Xuezhong

College of Intelligence Science, National University of Defense Technology, Changsha 410073

Received:2019-08-12 Revised:2019-10-12 Online:2020-07-05 Published:2020-08-01

摘要/Abstract

摘要： 分析了微半球振动陀螺的装配误差形成机理，对装配精度要求进行了计算。在微半球结构锚点直径为1 mm的情况下，要保证装配间隙均匀度小于10%，锚点面的高度偏差需要小于0.1 μm。通过数值计算和有限元模型，分别研究了装配误差对电极驱动能力、静态检测电容、静电刚度调节能力，以及1阶模态振型的影响。计算结果表明，电极间隙不均匀对检测、驱动和静电刚度修调能力的影响分别呈1、2、3次方关系，同时会引起微幅的结构偏摆。为提升电极装配间隙均匀性，设计了一种基于柔性缩小单元的微位移调节机构。该机构利用螺旋调节旋钮和柔性垫块，使石英玻璃基底产生2自由度微幅摆动，从而实现较高精度的装配。测试结果表明，微半球振动陀螺装配后平均电容误差约为30%~40%，但引入了较大的寄生电容，消除该影响后，电容平均误差为12%。

关键词: 微半球振动陀螺, 装配误差, 精密微调, 位移缩小机构

Abstract: The forming mechanism of assembly error of micro-hemispherical resonator gyroscope (mHRG) is analyzed, and the requirement of assembly accuracy is calculated. In case that the anchor diameter of mHRG structure is 1 mm, if the uniformity of assembly clearance is less than 10%, the height deviation of the anchor surface needs to be less than 0.1 μm. By using numerical calculation and finite element model, the effects of assembly errors on electrode driving ability, static capacitance, stiffness regulation and first-order mode shape are respectively studied. The results show that the uneven gap between electrodes influences detecting, driving and stiffness regulation as a function of 1st, 2nd, 3rd power, and at the same time it can cause a slight structural swing. In order to improve the uniformity of electrode assembly, a micro-regulator based on flexible reduction unit is designed. By using the adjusting screw and flexible cushion, the quartz glass substrate can generate a 2-DOF micro-swing, thus achieving high precise assembly. Test results show that the average capacitance error of the mHRG is about 30%~40% after assembly, but parasitic capacitances are introduced. After eliminating parasitic influence, the average capacitance error is 12%.

Key words: micro-hemispherical resonator gyroscope, assembly error, precise micro-regulate, motion reduction mechanism

中图分类号:

TP212

席翔, 肖定邦, 李微, 卢坤, 石岩, 袁超, 吴学忠. 微半球振动陀螺的装配误差分析与精密微调机构设计[J]. 机械工程学报, 2020, 56(13): 77-83.

XI Xiang, XIAO Dingbang, LI Wei, LU Kun, SHI Yan, YUAN Chao, WU Xuezhong. Analysis of Assembly Errors and Design of Precise Micro-regulator for Micro-hemispherical Resonator Gyroscope (mHRG)[J]. Journal of Mechanical Engineering, 2020, 56(13): 77-83.

参考文献

[1] CHO J Y, WOO J K,HE G,et al. 1.5-Million Q-factor vacuum-packaged birdbath resonator gyroscope (BRG)[C]//IEEE MEMS. Seoul,Korea,2019:210-213.
[2] SORENSON L D,GAO X,AYAZI F. 3-D micromachined hemispherical shell resonators with integrated capacitive transducers[C]//IEEE MEMS. Paris,France,2012:168-171.
[3] 汪红兵,林丙涛,梅松,等. 微半球谐振陀螺技术研究进展[J]. 微纳电子技术,2017,54(11):772-780. WANG Hongbing,LING Bingtao,MEI Song,et al. Research development of micro hemispherical resonator gyro (μHRG) technology[J]. Micronanoelectronic Technology,2017,54(11):772-780.
[4] CHO J Y,YAN J,GREGORY J A,EBERHART H W,et al. 3-dimensional blow torch-molding of fused silica microstructures[J]. Journal of Microelectromechanical Systems,2013,22(6):1276-1284.
[5] CHO J Y,NAGOURNEY T,DARVISHIAN N,et al. Ultra conformal high aspect-ritio small-gap capacitive electrode formation technology for 3D micro shell resonators[C]//IEEE MEMS. Las Vegas,USA,2017,1169-1172.
[6] SENKAL D,AHAMED M J,TRUSOV A A,et al. Electrostatic and mechanical characterization of 3-D micro-wineglass resonators[J]. Sensors and Actuators A:Physical,2014,215:150-154.
[7] MOHAMMAD H,ASADIAN,WANG Y,et al. Controlled capacitive gaps for electrostatic actuation and tuning of 3D fused quartz micro wineglass resonator gyroscope[C]//IEEE International Symposium on Inertial Sensors and Systems. Kauai,USA,2017,19-22.
[8] 郝永平,王永杰,董福禄,等. 平板类微小零件装配控制策略与软件架构研究[J]. 机械工程学报,2015,51(4):193-198. HAO Yongping,WANG Yongjie,DONG Fulu,et al. Study of control strategy and software architecture based on flat type small parts assembly[J]. Journal of Mechanical Engineering,2015,51(4):193-198.
[9] 陈国良,黄心汉,王敏. 面向微装配的显微视觉伺服[J]. 机械工程学报,2008,44(2):82-86. CHEN Guoliang,HUANG Xinhan,WANG Min. Micro-visual servoing for micro-assembly[J]. Journal of Mechanical Engineering,2008,44(2):82-86.
[10] 段瑞玲,李庆祥,李玉和. 微装配技术的发展现状及关键技术[J]. 光学精密工程,2004,12(3):27-30. DUAN Ruiling,LI Qingxiang,LI Yuhe. Review of micro-assemnly and its key technology[J]. Optics and Precision Engineering,2004,12(3):27-30.
[11] LI Wei,XI Xiang,LU Kun,et al. A Novel High transduction efficiency micro shell resonator gyroscope with sixteen T-shape masses[J]. IEEE Sensors Journal,2019,19(13):4820-4828.
[12] XIAO Dingbang,LI Wei,HOU Zhanqiang,et al. Fused silica micro shell resonator with T-shape masses for gyroscopic application[J]. IEEE Journal of Microelectromechanical Systems,2018,27(1):47-58.
[13] LI Wei,HOU Zhanqiang,LU Kun,et al. Micro shell resonator with T-shape masses fabricated by micro blow-torching using whirling platform[C]//Transducers. Kaohsiung,TAIWAN,China. 2017,1895-1898.
[14] 杨亚非,赵辉. 固体波动陀螺[M]. 北京:国防工业出版社,2009. YANG Yafei,ZHAO Hui. Solid state wave gyro[M]. Beijing:National Defence Industry Press,2009.
[15] 屈维德. 机械振动手册[M]. 北京:机械工业出版社,2000. QU Weide. Handbook of Mechanical Vibration[M]. Beijing:China Machine Press,2000.
[16] LI Wei,HOU Zhanqiang,XIAO Dingbang,et al. Decoupling design of stiffness and mass for micro shell resonator with high sensitivity[C]//IEEE MEMS. Belfast,Northern Ireland,2018,21-25.

微半球振动陀螺的装配误差分析与精密微调机构设计

Analysis of Assembly Errors and Design of Precise Micro-regulator for Micro-hemispherical Resonator Gyroscope (mHRG)

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