磁流变平整加工中平动对平整度的影响*

doi:10.3901/JME.2017.01.206

机械工程学报 ›› 2017, Vol. 53 ›› Issue (1): 206-212.doi: 10.3901/JME.2017.01.206

• 制造工艺与装备 • 上一篇

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磁流变平整加工中平动对平整度的影响^*

王永强^1,2, 尹韶辉^1,2, 李叶鹏^1,2, 胡天³, 陈逢军^1,2

1. 湖南大学智能激光制造研究中心长沙 410082；
2. 湖南大学国家高效磨削工程技术研究中心长沙 410082;
3. 长沙纳美特超精密制造技术有限公司长沙 430100

出版日期:2017-01-05 发布日期:2017-01-05
作者简介:王永强，男，1979年出生，博士研究生，讲师。主要研究方向为磁场辅助超精密加工。E-mail：rancher_wong@126.com尹韶辉(通信作者)，男，1967年出生，博士，教授，博士研究生导师。主要研究方向为超精密加工与纳米制造。E-mail：yinshaohui@hnu.edu.cn
基金资助:
* 国际科技合作与交流专项资助项目(2014DFG72480); 20151104收到初稿，20161014收到修改稿;

Effects of Translational Movement on Surface Planarity in Magnetorheological Planarization Process

WANG Yongqiang^1,2, YIN Shaohui^1,2, LI Yepeng^1,2, HU Tian³, CHEN Fengjun^1,2

1. Center for Intelligent Laser Manufacturing， Hunan University， Changsha 410082;
9B2. National Engineering Research Center for High Efficiency Grinding， Hunan University， Changsha 410082;
10B3. Changsha Nano-meter Ultra-precision Manufacturing Technology Ltd. Corp.， Changsha 430100

Online:2017-01-05 Published:2017-01-05

摘要/Abstract

摘要：

为改善平整度，提出在磁流变平整加工中加入平动。建立工件在磁流变硬化研抛工具上的运动轨迹方程，以该轨迹方程为基础建立了材料去除量的数学模型，对材料去除量分布作了仿真分析，探讨了轨迹规划、平动行程及平动速率等加工参数对平整度的影响;并进行了研抛试验。结果表明：工件沿磁轭的宽度方向单向平动，对平整度的改善最为显著，且平整度随平动行程增加而大幅降低，而平动速率对平整度的影响较弱。利用平动方式的磁流变平整加工方法研抛K9光学玻璃可获得微米级面形精度的超光滑平面。

关键词: 平动, 平整度, 磁流变平整加工

Abstract: To improve surface planarity, a reciprocate motion is integrated into the magnetorheoloigcal planarization process. A trajectory equation to describe the relative motion between the workpiece and the magnetorheological polishing tool is established, based on which a mathematical model for removal depth calculation is constructed. Effects of process parameters, such as trajectory type, reciprocate stroke and velocity, on surface planarity are explored. A simulation study is conducted on Matlab software. Some finishing experiments are carried out as well. The results show that surface planarity is well improved when the workpiece reciprocates only along the direction across air gap. Surface planarity decreases with the increase in reciprocate stoke but is slightly affected by reciprocate velocity. Using the magnetorheoloigcal planarization process with integrated translational movement, an ultra-smooth surface with planarity of micron scale and roughness of sub-nanometer scale is achieved on a K9 optical glass.

Key words: surface planarity, translational movement, magnetorheological planarization

王永强, 尹韶辉, 李叶鹏, 胡天, 陈逢军. 磁流变平整加工中平动对平整度的影响^*[J]. 机械工程学报, 2017, 53(1): 206-212.

WANG Yongqiang, YIN Shaohui, LI Yepeng, HU Tian, CHEN Fengjun. Effects of Translational Movement on Surface Planarity in Magnetorheological Planarization Process[J]. Journal of Mechanical Engineering, 2017, 53(1): 206-212.

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磁流变平整加工中平动对平整度的影响^*

Effects of Translational Movement on Surface Planarity in Magnetorheological Planarization Process

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