• CN:11-2187/TH
  • ISSN:0577-6686

›› 2014, Vol. 50 ›› Issue (5): 147-151.

• 论文 • 上一篇    下一篇

激光微加工中产生的像差分析及补偿方法

潘雪涛;屠大维;蔡建文   

  1. 上海大学机电工程与自动化学院;常州工学院光电工程学院;常州工学院常州市光电子材料与器件重点实验室
  • 发布日期:2014-03-05

Aberration Analysis and Compensation Generated in Laser Microfabrication

PAN Xuetao;TU Dawei;CAI Jianwen   

  1. School of Mechatronic Engineering and Automation, Shanghai University School of Optoelectronic Engineering, Changzhou Institute of Technology Changzhou Key Laboratory of Optoelectronic Materials and Devices, Changzhou Institute of Technology
  • Published:2014-03-05

摘要: 激光微加工中,被加工材质与空气的折射率不同会产生像差,影响加工效果。基于激光微加工机理,运用波前像差函数推导出像差表达式,得到光学系统参数、加工深度与像差的关系曲线。采用泽尔尼克循环多项式对像差进行补偿,获得补偿后的系统点扩散函数。以双光子飞秒脉冲激光在光致变色材料上进行点加工为例,对该补偿函数进行数值模拟。仿真结果表明建立的补偿模型能有效校正像差。初级像差补偿后,加工点荧光信号强度衰减现象得到显著改善,加工深度可接近600 μm;二级像差补偿后,信号强度基本不随加工深度的改变而改变。提出使用开普勒望远镜系统进行像差补偿的方法并进行试验,对补偿效果进行深入分析。理论与试验结果为激光微加工过程中减小像差,改善加工效果提供了充分的依据。

关键词: 微加工;飞秒激光;折射率;泽尔尼克多项式;像差补偿

Abstract: The aberration is produced and the processing result is affected for the refractive index difference between the processed material and air in laser micro-fabrication. The aberration expressions are derived and the curves of optical system parameters, working depth and aberration are obtained by wave-front aberration function based on laser microfabrication mechanism. Zernike polynomials cycle is used to compensate for the aberrations to obtain post-compensation system point spread function. Take it for example, the femtosecond laser pulses is used for machining points in two-photon photo-chromic materials, a numerical simulation is conducted for the compensation function. Simulation results show that the aberration can be corrected effectively by the established model of compensation. When the primary aberration is compensated, the attenuation of the fluorescence signal intensity at the processing points has been significantly improved and the working depth is close to 600 μm. After secondary aberration compensation, the signal intensity does not change as the working depth is changed. Kepler telescope system is proposed to be used for aberration compensation and the compensation effect is analyzed based on the experiments. Theoretical and experimental results provide a sufficient basis for reducing the aberrations in laser microfabrication process and improving processing effects.

Key words: micro-fabrication;femtosecond laser;refractive index;Zernike polynomials;aberration compensation

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