磨粒辅助EDM与ECM复合加工技术

›› 2012, Vol. 48 ›› Issue (17): 159-164.

磨粒辅助EDM与ECM复合加工技术

孙树峰;计时鸣;谭大鹏;薛伟;吴鑫

浙江工业大学特种装备制造与先进加工技术教育部重点实验室;温州大学机电工程学院

发布日期:2012-09-05

Abrasive Assisted EDM & ECM Compound Machining

SUN Shufeng;JI Shiming;TAN Dapeng;XUE Wei;WU Xin

Key Laboratory of Special Purpose Equipment and Advanced Processing Technology of Ministry of Education, Zhejiang University of Technology School of Mechanical and Electrical Engineering, Wenzhou University

Published:2012-09-05

摘要/Abstract

摘要： 微机电系统(Micro electromechanical systems, MEMS)的快速发展与产品微型化的发展趋势对微细结构表面(包括微孔、微槽和微棱柱/锥等)的加工质量提出了更高的要求，为了提高微细结构表面的加工质量，提出一种磨粒辅助放电加工(Electro discharge machining, EDM)与电化学加工(Electro chemical machining, ECM)复合加工新方法，通过建立微加工模型分析了该方法的加工机理，搭建了微加工试验平台，并进行了工艺参数优化研究，采用直径500 μm和75 μm的钨电极在SUS 304不锈钢上分别进行了微盲孔和微通孔加工试验研究，结果表明，在所用的EDM、EDM与ECM复合加工和磨粒辅助EDM与ECM复合加工三种方法中，磨粒辅助EDM与ECM复合加工方法获得的表面粗糙度(Ra15 nm)最高，因此该方法是微细结构表面高效和高质量加工的最佳方法之一。

关键词: 电化学加工, 放电加工, 结构化表面

Abstract: The rapid development of micro electromechanical systems (MEMS) and the miniaturization trend of products require much higher machining quality for micro structural surfaces such as micro hole, micro groove and micro prism/pyramid and so on. In order to improve the machining quality of micro structural surfaces, a new method of abrasive assisted electro discharge machining (EDM)and electro chemical machining (ECM) compound machining is provided. The machining mechanism is analyzed by its micro machining model. Micro machining equipment is set up. Process parameters are optimized. Blind and through holes are drilled on SUS 304 stainless steel using tungsten electrodes whose diameters are 500 μm and 75 μm separately. The results indicate that abrasive assisted EDM & ECM compound machining obtains the highest surface roughness (Ra15 nm) among the three methods of EDM, EDM & ECM compound machining and abrasive assisted EDM & ECM compound machining. Therefore, this is one of the best methods which can be used to machining micro structural surfaces with high efficiency and high quality.

Key words: Electro chemical machining, Electro discharge machining, Structural surfaces

中图分类号:

TH161

孙树峰;计时鸣;谭大鹏;薛伟;吴鑫. 磨粒辅助EDM与ECM复合加工技术[J]. , 2012, 48(17): 159-164.

SUN Shufeng;JI Shiming;TAN Dapeng;XUE Wei;WU Xin. Abrasive Assisted EDM & ECM Compound Machining[J]. , 2012, 48(17): 159-164.

[1]	李淑娟, 辛彬, 杨宇祥, 路雄, 李言, 蒋百灵, 贾祯, 李玉玺. 放电加工极间等离子体伏安特性与间距建模研究[J]. 机械工程学报, 2019, 55(5): 232-240.
[2]	洪汉, 顾琳, 徐辉, 赵万生. 侧铣式高速电弧放电加工的极间流场仿真及加工试验[J]. 机械工程学报, 2015, 51(9): 176-183.
[3]	徐辉, 顾琳, 赵万生, 洪汉, 张发旺, 陈吉朋. 高速电弧放电加工的工艺特性研究[J]. 机械工程学报, 2015, 51(17): 177-183.
[4]	宋金龙;徐文骥;陆遥;刘新;魏泽飞;孙晶. 电化学和化学加工法制备铝基体超双疏表面[J]. , 2013, 49(5): 182-190.
[5]	庞桂兵;李殿明;齐学智;徐文骥;温春盛;赵秀君;杨林. 电化学蚀除法调控1Cr18Ni9Ti表面润湿性的研究[J]. , 2012, 48(21): 105-109.
[6]	刘志东;邱明波;汪炜;田宗军;黄因慧. 锗晶体放电加工特性及进电方式研究[J]. , 2011, 47(5): 177-182.
[7]	庞桂兵;阿达依&#;谢尔亚孜旦;徐文骥;周锦进. 展成式电化学机械光整加工圆柱齿轮的齿面质量与精度特性[J]. , 2011, 47(19): 163-167.
[8]	计时鸣;李琛;谭大鹏;袁巧玲;池永为;赵凌寒. 基于Preston方程的软性磨粒流加工特性[J]. , 2011, 47(17): 156-163.
[9]	计时鸣;唐波;谭大鹏;宫斌;袁巧玲;潘艳. 结构化表面软性磨粒流精密光整加工方法及其磨粒流动力学数值分析[J]. , 2010, 46(15): 178-184.
[10]	谢晋;汤勇;田牧纯一. 金刚石砂轮金属结合剂的气中单脉冲电火花放电去除机理[J]. , 2007, 43(7): 93-98.
[11]	张之敬;金鑫;周敏. 精密微小型制造理论、技术及其应用[J]. , 2007, 43(1): 49-61.
[12]	张朝阳;朱荻;王明环. 纳秒脉冲微细电化学加工的理论及试验[J]. , 2007, 43(1): 208-213.
[13]	吴高阳;张之敬;王志芳;付伟. 高频群脉冲电化学加工在微制造中的应用[J]. , 2006, 42(增刊): 60-64.
[14]	李立青;赵万生;狄士春;王振龙. 气体放电加工基础工艺试验研究[J]. , 2006, 42(2): 203-207.