• CN:11-2187/TH
  • ISSN:0577-6686

›› 2011, Vol. 47 ›› Issue (9): 97-104.

• 论文 • 上一篇    下一篇

基于多粒度宏建模的MEMS非标结构设计方法

徐敬华;张树有;裘乐淼   

  1. 浙江大学流体传动及控制国家重点实验室
  • 发布日期:2011-05-05

Design Method of Non-standard Structure for MEMS Based on Multi-granularity Macro-modeling

XU Jinghua;ZHANG Shuyou;QIU Lemiao   

  1. State Key Lab of Fluid Power Transmission and Control, Zhejiang University
  • Published:2011-05-05

摘要: 随着微电子机械系统(Micro electro mechanical systems, MEMS)应用的广泛化与需求的多样化,现有由参数化单元库内的结构组合的设计方法已难以满足非标设计需求。为此,给出一种支持非标结构设计的多粒度宏模型的映射提取与等效近似方法。在多粒度宏建模的MEMS设计层次和流程中,通过MEMS器件的完备有限元模型的节点关联与组合,映射提取描述系统的整体矩阵,获得系统的基于低阶常微分方程组的精确模型。按列一维方式变带宽存储大型稀疏对称矩阵,由拉格朗日多项式拟合和广义极小剩余获取等效近似模型,建立非标结构的系统级保真输入输出关系,连接器件级模型和系统级模型,不断迭代实现产品设计。以ACIS为几何造型内核开发自主原型系统,以数字光处理微镜为例进行验证,结果表明,该方法将局限于单元库内简单器件的设计拓展到支持复杂奇异非标结构的设计,这对于提高MEMS设计质量和效率具有重要意义。

关键词: 多粒度宏建模, 非标结构, 模型降阶, 微机电系统

Abstract: With the widespread application and diversified demands of micro electro mechanical systems (MEMS), it is difficult to meet the design requirements of non-standard for the current design method of structure combination in the parametric elements library. Therefore, a method of mapping extraction and equivalent approximation of multi-granularity macro-model which supports non-standard structure design is presented. In the MEMS design level and flow of multi-granularity macro-modeling, the global matrix which describes the system is extracted through association and combination of nodes of complete finite element model of the MEMS device. The precise system model based on the low-order ordinary differential equations is then achieved. The large-scale sparse symmetric matrix is saved via one-dimensional variable bandwidth storage. The equivalent approximation model is obtained by Lagrange polynomial fitting and generalized minimal residuals. The fidelity relationships between the input and output of the system of the non-standard structure are built to connect the models of connector level and system level. The product continuous is finally realized via design iteration. The independent prototype system using ACIS as geometry modeling kernel is developed to verify the proposed method by a digital light procession micro-mirror. The test results prove that the present design ability is extended from limited simple devices in element library to the complex, strange, non-standard structure. It has important significance to improve efficiency and quality of the design of MEMS.

Key words: Micro electro mechanical systems, Model order reduction, Multi-granularity macro-modeling, Non-standard structure

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