• CN:11-2187/TH
  • ISSN:0577-6686

›› 2011, Vol. 47 ›› Issue (16): 9-13.

• 论文 • 上一篇    下一篇

超精密微动台控制器带宽优化研究

杨进;尹文生;朱煜;胡金春;段广洪   

  1. 清华大学精密仪器与机械学系;清华大学摩擦学国家重点实验室
  • 发布日期:2011-08-20

Controller Bandwidth Optimization for Ultra-precision Position Stage

YANG Jin;YIN Wensheng;ZHU Yu;HU Jinchun;DUAN Guanghong   

  1. Department of Precision Instruments and Mechanology, Tsinghua University State Key Laboratory of Tribology, Tsinghua University
  • Published:2011-08-20

摘要: 为提高超精密微动台的控制带宽,改善控制性能,针对微动台模型包含机械谐振以及时滞的特性研究一种优化回路成形(Optimized loop shaping, OLS)控制器设计方法。通过回路成形方法分析得出PID控制器相位超前量不足是造成带宽受限的主要因素,并给出一种能实现高带宽的高阶控制器。利用回路成形(Loop shaping, LS)设计方法将控制器参数设计描述为优化问题,并利用遗传算法对其进行求解。将OLS控制器与试验整定的PID控制器进行试验对比,结果显示采用OLS控制器的系统的上升时间、调整时间、定位精度都有较大幅度地改善,最大超调量有所增加但仍在工程允许的范围内,表明所提出方法能够减小控制器设计对经验的依赖并有效提高地超精密微动台的控制性能。

关键词: 超精密微动台, 控制带宽, 控制器优化, 遗传算法

Abstract: To improve the control bandwidth and the performances of an ultra-precision positioning stage which has mechanical resonant and system delay, an optimized loop shaping (OLS) controller design method is presented. Analysis based on loop shaping design method shows that insufficient phase lead of the PID type controller is the major bandwidth limiting factor. And a higher order controller promising to achieve a higher control bandwidth is proposed. Controller parameters design is described as an optimization problem with loop shaping (LS) design method, and then solved by generic algorithm. Comparative experiments are carried out between the OLS controller and the PID controller tuned by trial and error. The results indicate the performances such as rising time, setting time and positioning error improve considerably, while the maximal overshoot increases somewhat but remains in the allowable range of engineering practice, which validates the effectiveness of the proposed method.

Key words: Control bandwidth, Controller optimization, Generic algorithm, Ultra-precision positioning stage

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