关键词: 静电刚度, 灵敏度, 鲁棒性, 微电子机械系统, 误差, 谐振微加速度计, 热流体动力润滑, 浮环轴承, 环速比, 热效应

Abstract: Error sensitivity analysis theory is used to carry out the robustness design of initial resonant frequency of electrostatic stiffness resonant micro accelerometer under process error, and the co-fielding parametrical relation is constructed by analytical method based on the condition of frequency robustness, which indicates that the robustness can be achieved either by rational structural dimensional relation in mechanical field or by the rational adjustment of voltage in electrostatic field, which can greatly decreases the difficulty of structural design and requirement of fabrication. The robustness of frequency is realized by regulation of voltage in driving circuit according to the characteristics of micro accelerometer and micro fabrication, which indicate that the fluctuation of micro-electro-mechanical systems(MEMS) device performance caused by fabrication error can be compensated by an appropriate circuit regulation. And the resonator structure is fabricated by silicon bonding and deep reaction ion etching(DRIE) technologies, its parameters are substituted into the analytical expressions for calculation, the results indicate the applied sensing voltage should be 1.37 V to ensure the robustness of frequency.

Key words: Electrostatic stiffness, Error, Micro-electro-mechanical systems(MEMS), Resonant micro-accelerometer, Robustness, Sensitivity, thermal effect , ring speed ratio, thermo-hydrodynamic (THD), floating ring bearing