关键词: 机器人化, 纳米操作, 探针定位, 信息反馈, 原子力显微镜

Abstract: The development of nanomanipulation based on scanning tunnel microscopr and atomic force microscope (AFM) is introduced, and the necessity of robotic nanomanipulation is presented for solving the problems in the nanomanipulation. Then the research development, state and main existing problems of robotic nanomanipulation are analyzed, according to which the structure prototype of AFM based nanomanipulation system is presented, and key technical problems for realizing robotized nanomanpulation is put forward, which provide valuable ideas for further research work on robotic nanomanipulation.

Key words: Atomic force microscope, Information feedback, Nanomanipulation, Probe positioning, Robotization