关键词: 视觉伺服, 微夹钳, 微装配机器人, 显微图像获取

Abstract: A micro-assembly robot system with multi-manipulator cooperation is developed. The system includes two master micromanipulators with 4 DOFs and one slave micromanipulator with 3 DOFs and adopts double optical path orthogonal micro-vision as the main means to obtain the poses and environmental information of robot and micro-objects . To adapt to the operation requirements of micro-objects of different shapes and materials, the vacuum micro-gripper and piezoelectric ceramic micro-gripper are designed respectively, and their control methods are given on the basis of analyzing the working principle of micro-grippers. Problems such as micro-image acquisition and visual servo are studied, including wiener inverse filter restoration of blurred image, auto focus of microscope based on image analysis, and micro-vision servo control based on the image features of distance and angle. A semi-autonomous control scheme with human-robot interaction is utilized in the micro assembly operation. Assembly results demonstrate that the system works reliably and can accomplish micro assembly task that has complicated technological requirements. Presently the smallest assembly accuracy of micro-parts can attain 30 μm.

Key words: Micro assembly robot, Micro-gripper, Micro-image acquisition, Visual servo