四自由度压电微夹钳的设计

doi:10.3901/JME.2017.23.165

机械工程学报 ›› 2017, Vol. 53 ›› Issue (23): 165-173.doi: 10.3901/JME.2017.23.165

四自由度压电微夹钳的设计

崔玉国, 王子宾, 马剑强, 郑军辉, 邬亮恩

宁波大学机械工程与力学学院宁波 315211

收稿日期:2016-10-12 修回日期:2016-10-12 发布日期:2017-12-05
通讯作者: 崔玉国(通信作者),男,1971年出生,博士,教授,博士研究生导师。主要研究方向为纳米定位、精密测量。E-mail:cuiyuguo@nbu.edu.cn
作者简介:王子宾,男,1989年出生,硕士研究生。主要研究方向为纳米定位。E-mail:1005805621@qq.com。
基金资助:
国家自然科学基金（51175271）和浙江省高等学校中青年学科带头人学术攀登计划（pd2013091）资助项目。

Design of a 4-DOF Piezoelectric Micro-gripper

CUI Yuguo, WANG Zibin, MA Jianqiang, ZHENG Junhui, WU Liangen

The Faculty of Mechanical Engineering and Mechanics, Ningbo University, Ningbo 315211

Received:2016-10-12 Revised:2016-10-12 Published:2017-12-05

摘要/Abstract

摘要： 为降低微夹钳前端执行机构的复杂度，探索四自由度压电微夹钳的实现问题。通过在被设计成夹钳形状的两个压电单晶片的非黏结面上制作相互绝缘的驱动电极，且使两个非黏结面上驱动电极相互对齐的方法，设计出了可同时产生夹持方向与垂直于夹持方向位移的四自由度压电微夹钳；采用压电悬臂梁变形理论，推导出了钳指位移同钳指几何参数、驱动电压的关系，进而在对钳指进行尺寸优化的基础上，采用有限元方法分析了其静动态特性；最后，对微夹钳的静动态特性进行了测试，结果表明：当驱动电压为60 V时，左钳指、右钳指在夹持方向上的位移分别为25.7 μm、26.1 μm，左、右钳指在垂直于夹持方向上的位移分别为33.5 μm、32.8 μm，钳指位移具有很好的重复性；微夹钳在夹持方向和垂直于夹持方向的固有频率分别为2.35 kHz、0.62 kHz；在15 V的阶跃电压作用下，微夹钳在夹持方向和垂直于夹持方向的响应时间均为0.23 s。

关键词: 结构设计, 四自由度, 特性分析与测试, 压电微夹钳

Abstract: To reduce the complexity of micromanipulation system, a 4-DOF piezoelectric micro-gripper is proposed. Firstly, a 4-DOF piezoelectric micro-gripper is designed using the piezoelectric bimorph actuators. The gripper could bring displacements both in the gripping direction and the vertical direction. The gripper is composed of two unimorphs which is designed as clamp shape. The driving electrodes of the gripper are fabricated on non adhesive surface of each unimorph. The driving electrodes on the unimorph are mutually insulated and aligned with each other. Secondly, the relationships between the displacement and the geometric parameters of the finger, as well as driving voltage are deduced based on the bending theory of piezoelectric cantilevers. Then the static and dynamic characterizations of the optimized gripper are analyzed using ANSYS. Finally, the static and the dynamic performances of the micro-gripper are tested experimentally. The results show that:at the driving voltage of 60 V, the displacements of the left and right finger in the gripping direction are 25.7 μm and 26.1 μm, respectively; the displacements of the left and right finger in the vertical direction are 33.8 μm and 32.8 μm, respectively. The displacements of two fingers have good repeatability. In the gripping direction and the vertical direction, the natural frequencies of the gripper are 2.35 kHz and 0.62 kHz, respectively. The response time of the micro-gripper in the gripping direction and vertical to the gripping direction are both 0.23 s at the step voltage of 15 V.

Key words: 4-DOF, analysis and test of performance, piezoelectric micro-gripper, structure design

中图分类号:

TH39

崔玉国, 王子宾, 马剑强, 郑军辉, 邬亮恩. 四自由度压电微夹钳的设计[J]. 机械工程学报, 2017, 53(23): 165-173.

CUI Yuguo, WANG Zibin, MA Jianqiang, ZHENG Junhui, WU Liangen. Design of a 4-DOF Piezoelectric Micro-gripper[J]. Journal of Mechanical Engineering, 2017, 53(23): 165-173.

参考文献

[1] TSUI K, GEISBERGER A A, MATT E, et al. Micromachined end-effector and techniques for directed MEMS assembly[J]. Journal of Micromechanics and Microengineering, 2004, 14(4):542-549.
[2] CHOI Y, ROSS J. Mechanically driven microtweezers with integrated microelectrodes[J]. Journal of Micromechanics and Microengineering, 2004, 8(6):141-149.
[3] ALOGLA A, SCANLAN P, SHU W M, et al. A scalable syringe-actuated microgripper for biological manipulation[J]. Sensors and Actuators A:Physical, 2013, 202:135-139.
[4] ALOGLA A F, AMALOU F, BALMER C, et al. Micro-tweezers:Design, fabrication, simulation and testing of apneumatically actuated micro-gripper for micromanipulation andmicrotactile sensing[J]. Sensors and Actuators A:Physical, 2015, 236:394-404.
[5] 席文明,钟辉. 电磁力驱动的微夹持技术[J]. 纳米技术与精密工程, 2008, (3):195-198. XI Wenming, ZHONG Hui. Micro-tweezer technology driven by electromagnetic force[J]. Nanotechnology and Precision Engineering, 2008, (3):195-198.
[6] GIOUROUDI I, HÖTZENDORFER H, KOSEL J, et al. Development of a microgripping system for handling of microcomponents[J]. Precision Engineering, 2008, 32(2):148-152.
[7] KYUNG J H, KO B G, HA Y H, et al. Design of a microgripper for micromanipulation of microcomponents using SMA wires and flexible hinges[J]. Sensors and Actuators A:Physical, 2008, 141(1):144-150.
[8] MOHAMED A M S, TAKAHATA K. Frequencycontrolled wireless shape-memory-alloy microactuators integrated using an electroplating bonding process[J]. Sensors and Actuators A:Physical, 2010, 163(1):363-372.
[9] MOKRANE B, YASSINE H. Modeling and optimal force control of a nonlinear electrostatic microgripper[J]. IEEE/ASME Transaction on Mechatronics, 2013, 18(3):1830-1839.
[10] MOKRANE B, MARCELO G de F, YANN L G, et al. An output feedback LPV control strategy of a nonlinear electrostatic microgripper through a singular implicit modeling[J]. Control Engineering Practice, 2015, 236:394-404.
[11] 张然,褚金奎,王海祥,等. 具有三层结构的SU-8胶V形微电热驱动器[J]. 光学精密工程, 2012, 20(7):1500-1508. ZHANG Ran, CHU Jinkui, WANG Haixiang, et al. SU-8 chevron electrothermal micro-actuator with threelayer structure[J]. Optics and Precision Engineering, 2012, 20(7):1500-1508.
[12] BELEN S, JAMES M, ANDREW G, et al. Modelling and experimental verification of heat dissipation mechanismsin an SU-8 electrothermal microgripper[J]. Microelectronic Engineering, 2014, 124:90-93.
[13] SANDEEP K,LAXMAN S. Design and development of a novel micro-clasp gripper for micromanipulation of complex-shaped objects[J]. Sensors and Actuators A:Physical, 2012, 176:110-123.
[14] KIM B S, JOON S P, KANG B H, et al. Fabrication and property analysis of a MEMS micro-gripper for robotic micro-manipulation[J]. Robotics and ComputerIntegrated Manufacturing, 2012, 28:50-56.
[15] XU Qingsong. A new compliant microgripper with integrated position and force sensing[C]. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, 2013.7.9-7.12:574-579.
[16] 刘畅. 微装配机器人关键技术研究[D]. 武汉:华中科技大学, 2012. LIU Chang. Research on key technologies of microassembly robot system[D]. Wuhan:Huazhong University of Science & Technology, 2012.
[17] JAIN R K, MAJUMDER S, GHOSH B, et al. Deflection control for piezoelectric actuator through voltage signal and it's application in micromanipulation[J]. Mechanical Systems and Signal Processing, 2015, 62-63:305-323.
[18] 崔玉国, 郑军辉, 马剑强, 等. 压电自感知微夹钳[J]. 光学精密工程, 2015, 23(7):1996-2004. CUI Yuguo, ZHENG Junhui, MA Jianqiang, et al. Self-sensing piezoelectric micro-gripper[J]. Optics and Precision Engineering, 2015, 23(7):1996-2004.
[19] 张福学,王丽坤. 现代压电学(上册)[M]. 北京:科学出版社, 2001. ZHANG fujun, WANG likun. Modern piezoelectricty(I)[M]. Beijing:Science Press, 2001.
[20] 刘鸿文. 材料力学[M]. 北京:高等教育出版社, 2011. LIU hongwen. Mechanics of materials[M]. Beijing:Higher Education Press, 2011.

四自由度压电微夹钳的设计

Design of a 4-DOF Piezoelectric Micro-gripper

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