• CN：11-2187/TH
  • ISSN：0577-6686
机械工程学报

›› 2008, Vol. 44 ›› Issue (11): 2-12.

• 论文 •    下一篇

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中国微纳制造研究进展

王立鼎;褚金奎;刘冲;罗怡   

  1. 大连理工大学精密与特种加工教育部重点实验室;大连理工大学辽宁省微纳米技术及系统重点实验室
  • 发布日期:2008-11-15

New Developments on Micro-nano Manufacture Technology in China

WANG Liding;CHU Jinkui;LIU Chong;LUO Yi   

  1. Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology
  • Published:2008-11-15

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摘要： 介绍了中国微纳制造领域的总体概况。从微构件力学性能、微纳摩擦磨损及粘附行为研究、典型微流体器件输运特性研究、拓扑优化技术在微纳结构设计中的应用研究、微传热学的研究和微测试方法和装置的研究具体介绍了微纳制造基础理论方面取得的进展。从设计方法、硅基微机电系统(Micro electro mechanical system，MEMS)制造工艺、非硅MEMS制造工艺等方面介绍了微系统设计与加工工艺研究进展。从物理量微传感器、微执行器件与系统、微纳生化传感与分析和微能源等方面介绍了微纳器件与微纳系统的研究进展，最后对中国微纳制造发展进行了总结和展望。

关键词: 微传感器, 微电子机械系统, 微纳制造, 微执行器

Abstract: The current status of micro-nano manufacture technology in China is outlined firstly. The new research developments on micro mechanical properties, micro friction wear and sticking, micro fluidics in typical micro flow device, topological optimum application in micro-nano structural design, micro thermal transforming behavior in micro electro mechanical system (MEMS) are emphasized. The new achievements on design methodology of MEMS, the manufacture techniques including silicon base and no silicon base are introduced, the new developments on such as micro sensors, micro actuators, micro system as well as lab-on-chip device and micro power system are also listed. Finally, some conclusions are given out.

Key words: Micro actuator, Micro electro mechanical system(MEMS), Micro sensor, Micro-nano manufacture technology

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