关键词: 弹性变形, 低成本, 精密定位, 平板弹簧, 电液振动, 频率, 振幅, 造波机

Abstract: Based on the deformation characteristic of compliant plates, a low cost, monolithic compliant precise positioning stage is presented. A multi-layer-plate spring is designed, which is helpful to realizing high accuracy output of the stage without needing highly precise actuator and control system, so the cost of the stage is lower than that of other types of micro-positioning stages. The stiffness model of the stage is established, and the relationship between the accuracy of the actuator and the positioning accuracy of the stage is analyzed. The key structural parameters that influence the positioning accuracy are obtained, which is helpful to reducing the error caused by manufacture. Experimental results show that the input displacement and accuracy of the stage are 4 mm and 10 m respectively. The output displacement and accuracy of the stage are 9 m and 40 nm respectively. The linearity of the output displacement is 0.33%. The research is helpful in designing a low cost compliant stage with a high accuracy.

Key words: Elastic deformation, Low cost, Multi-layer-plate spring, Precise positioning