硅微电阻电热式推进器的加热电阻的设计制作和试验研究

›› 2006, Vol. 42 ›› Issue (2): 105-109.

硅微电阻电热式推进器的加热电阻的设计制作和试验研究

唐飞;王晓浩;叶雄英;周兆英

清华大学精密测试技术及仪器国家重点实验室

发布日期:2006-02-15

DESIGN, FABRICATION AND EXPERIMENT OF A HEATING RESISTOR IN SILICON-BASED MICRO-RESISTOJET

TANG Fei;WANG Xiaohao;YE Xiongying;ZHOU Zhaoying

State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University

Published:2006-02-15

摘要/Abstract

摘要： 在电阻电热式微推进器中，用体硅设计制作了立柱状结构的加热电阻。典型的加热电阻柱横断面积为240 mm×60 mm，高度为150 mm，沟槽的宽度为50 mm。采用ICP(诱导耦合等离子)工艺制作。利用杂质半导体材料的电阻率随温度的变化特性，在施加恒流源的情况下，可以使加热电阻的工作温度具有自动调节功能，保持在本征温度附近，避免烧毁电阻。理论分析和试验结果证实了这种加热电阻的可行性及其温度自动调节功能。试验测量的74 W的加热电阻的本征温度为550 K，与理论预测值相符。

关键词: MEMS, 加热电阻, 微推进器, 自动调节

Abstract: A rhombic column heater, with the cross section area of 240 mm×60 mm, the height of 150 mm and the gap width of 50 mm, is designed and fabricated by ICP technology. It takes full advantage of the characteristics of the specific resistance-temperature variance of extrinsic semiconducting material to add the automatic thermoregulation function to the microthruster heating system, keep the temperature near the intrinsic point, and avoid the heater sintering by overheat, when constant current is supplied. The feasibility of the heater and the automatic thermoregulation function are already verified by the theoretical analysis and the experimental result. The intrinsic temperature of the tested heater with resistance of 74 W is 550 K, which is consistent with the theoretical value.

Key words: Self-regulation, Heating resistor, MEMS, Microthruster

中图分类号:

唐飞;王晓浩;叶雄英;周兆英. 硅微电阻电热式推进器的加热电阻的设计制作和试验研究[J]. , 2006, 42(2): 105-109.

TANG Fei;WANG Xiaohao;YE Xiongying;ZHOU Zhaoying. DESIGN, FABRICATION AND EXPERIMENT OF A HEATING RESISTOR IN SILICON-BASED MICRO-RESISTOJET[J]. , 2006, 42(2): 105-109.

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