关键词: 硅(100), 聚二甲基硅氧烷, 湿法腐蚀, 微流控芯片, 制作

Abstract: A method is developed to fabricate polydimethylsiloxane (PDMS) microfluidic chip. After making the casting mould by anisotropy etching silicon(100) with 15% (CH3)4NOH, PDMS microfluidic chip can be get by casting and middle vacuum bonding. All procedures are finished in about 10 h. The whole process is monitored by SEM or confocal microscope. The relative standard deviation of micropatterns of the silicon mold and PDMS microfuidic chip are under 3% and 1%, the smoothness is 0.051 μm and 0.183 μm respectively. Electrophoresis separation is carried out on the fabricated PDMS microfluidic chip. Been applied 200 V/cm electric field, the mixture of TPPS and TCPcCo(Ⅱ) is successfully separated within 30 s in 4.7 cm long channel.

Key words: Fabrication, Microfluidic chip, Polydimethylsiloxane (PDMS), Wet etching Silicon(100)