关键词: 磁悬浮平台, 动态解耦控制, 干扰观测器, 精密定位, 直线电动机

Abstract: A novel planar magnetic suspension stage that has the characteristics of nonlinear, multi-variance and strong coupling is introduced. Applying the inverse system theory of nonlinear and multi-variance, a dynamics decoupling control approach is represented to this linear-motors driven stage to separate the object system into three subsystem by linear motors by state feedback linearization. At the same time, disturbance observer is used to attain the full-scale disturbances suppression. The result of simulation indicate the proposed scheme have better dynamic and static characteristics and robust.

Key words: Disturbance observer, Dynamic decoupling control, Linear motor, Planar magnetic suspension stage, Precision positioning