关键词: 微机电传感器, 微机电惯性传感器, 微机电系统

Abstract: The actuality and trend of developments and applications on micro electromechanical sensors since initial stage of 20 century eight decade are introduced. The international advance levels and native research achievements of inertial micro electromechanical sensors, and their application futures in both fields of military and civilian are discussed in emphases. The farther study aspects of micro electromechanical sensors are brought forward finally.

Key words: Inertial micro electromechanical sensors, Micro electromechanical sensors, Micro electromechanical systems