关键词: 动态特性, 空气支承, 压电陶瓷, 主动控制

Abstract: A new active controlled air bearing is presented based on the modern control theory. In the system, the micro-displacement of piezoelectric ceramics is used to compensate the bearing’s error caused by the vary of air membrane thickness with internal interference under the stable pressure of air supply. Based on the theoretical model, the optimal design of 2-D controller is introduced, so that the system has many ad-vantages：high precision, fast respond, powerful anti-interference，and the analysis of dynamic characteristics about bearing system is achieved. A theoretical basis is provided for application of active controlled air bearing.

Key words: Piezoelectric ceramics, Active control, Air bearing, Dynamic characteristics