• CN：11-2187/TH
  • ISSN：0577-6686
机械工程学报

›› 2002, Vol. 38 ›› Issue (3): 1-5.

• 论文 •    下一篇

微机电系统中微磨擦特性及控制研究

刘莹;温诗铸   

  1. 南昌大学机电工程学院;清华大学
  • 发布日期:2002-03-15

STUDY ON PERFORMANCES OF MICRO-FRICTION AND ITS CONTROL IN MEMS

Liu Ying;Wen Shizhu   

  1. Nanchang University Tsinghua University
  • Published:2002-03-15

PDF

167

摘要： 针对微机电系统设计中存在的微摩擦问题，论述了开展微观摩擦研究的意义和必要性。全面总结了微摩擦基本特性研究的进展，包括微观摩擦与宏观摩擦的对比，微观摩擦与表面形貌的相关性，以及粘滑现象等。提出了控制微摩擦特性的一些主要研究方向。

关键词: 特性与控制, 微机电系统, 微摩擦

Abstract: Based on the existing problems of micro-friction in MEMS design, the significance and needs of study on micro-friction are discussed. The progress of research on elemental performances of micro-friction is summarized, including micro-friction in comparison with micro-friction, relation between micro-friction with surface topography and mechanism of stick-slip. The main research directions for controlling micro-friction properties are proposed as well.

Key words: Micro electro-mechanical system, Micro-friction, Performance and control

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