能量天平精密无固有力低漏磁电磁阻尼器的设计与应用

doi:10.3901/JME.2022.04.269

机械工程学报 ›› 2022, Vol. 58 ›› Issue (4): 269-276.doi: 10.3901/JME.2022.04.269

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能量天平精密无固有力低漏磁电磁阻尼器的设计与应用

王大伟^1,2, 许金鑫³, 刘永猛^1,2, 白洋³, 曾涛⁴, 李正坤³, 张钟华³, 谭久彬^1,2

1. 哈尔滨工业大学超精密光电仪器工程研究所哈尔滨 150001;
2. 哈尔滨工业大学超精密仪器技术及智能化工业和信息化部重点实验室哈尔滨 150080;
3. 中国计量科学研究院电磁所国家质检总局电学量子重点实验室北京 100029;
4. 中国计量大学机电工程学院杭州 310018

收稿日期:2021-05-28 修回日期:2021-10-01 出版日期:2022-02-20 发布日期:2022-04-30
通讯作者: 刘永猛(通信作者),男,1979年出生,博士,教授,博士研究生导师。主要研究方向为超精密测量与智能装配等。E-mail:lym@hit.edu.cn
作者简介:王大伟,男,1989年出生,博士,助理研究员。主要研究方向为精密机械,精密测量。E-mail:16B901020@stu.hit.edu.cn
基金资助:
国家重点研究发展计划(2016YFF0200102)、国家自然科学基金(61575056,51805507,51807186)、国家自然科学基金重大研究计划重点(91536224)和浙江省自然科学基金(LQ20E050015)资助项目。

Design and Application of No Inherent Force and Low Magnetic Leakage Precision Damper for Joule Balance

WANG Dawei^1,2, XU Jinxin³, LIU Yongmeng^1,2, BAI Yang³, ZENG Tao⁴, LI Zhengkun³, ZHANG Zhonghua³, TAN Jiubin^1,2

1. Center of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150001;
2. Key Lab of Ultra-Precision Intelligent Instrumentation Ministry of Industry and Information Technology, Harbin Institute of Technology, Harbin 150080;
3. Key Laboratory of AQSIQ of China, National Institute of Metrology, Beijing 100029;
4. College of Mechanical and Electrical Engineering, China Jiliang University, Hangzhou 310018

Received:2021-05-28 Revised:2021-10-01 Online:2022-02-20 Published:2022-04-30

摘要/Abstract

摘要： 针对能量天平试验中力矢量加载引起悬挂系统持续摆动给测量引入系统误差的问题，提出一种同时兼顾悬挂线圈和砝码托盘的精密被动电磁阻尼器。该电磁阻尼器基于磁场的涡流效应，由金属阻尼片和永磁体组成。为了避免置于磁场中的弱磁性阻尼片给天平称重引入附加力，阻尼片由抗磁性材质和顺磁性材质按一定比例采用“铜-铝-铜”三层复合结构组合而成，复合型阻尼片在磁场中静止时受力被抵消。此外，为了避免阻尼器泄漏的强磁场磁化精密金属砝码，电磁阻尼器外设计组合式磁屏蔽罩：内部单层电工纯铁屏蔽罩和外部双层坡莫合金屏蔽罩。设计的阻尼器及其屏蔽罩进行有限元仿真分析、试验验证，结果表明，复合阻尼片静止时，固有力约为0.92 μg；电磁阻尼器在称重砝码位置的外泄磁场约为5.04 μT,小于地磁场量级；阻尼器将原有悬挂系统摆动时间缩短约88.3%；设计的阻尼器总体满足能量天平试验要求。

关键词: 质量量子基准, 能量天平, 电磁阻尼器, 低漏磁, 无固有力

Abstract: In the joule balance experiment, the suspension system will swing when force vectors are loaded on, which will introduce a systematic error in the Planck constant h measurement. A precision passive electromagnetic damper for both suspension coil and test mass pan is proposed. The principle of the electromagnetic damper is eddy current effect and it is composed of metal damping piece and permanent magnet. To eliminate the inherent force in the magnetic field, the damping piece is made of diamagnetic material andparamagnetic material in a certain proportion by using “Cu-Al-Cu” three-layer sandwich structure, then the magnetic field forces of three-layer dampers can be cancel each other. In addition, to avoid the magnetization of the test mass by the strong magnetic field leaking from the damper, multi-layer magnetic shield is designed, which contains an internal single-layer electrician pure iron shield and an external double-layer permalloy shield. The results of finite element simulation analysis and experiments show that: the inherent force is about 0.92 μg when the damping piece is static in the magnetic field; the leakage magnetic field at the position of the test mass is about 5.04 μT, less than the earth’s magnetic field; the swing time of the suspension system is reduced about 88.3% by using the designed electromagnetic dampers; overall, the proposed electromagnetic dampers meet the requirements of joule balance experiment.

Key words: mass quantum metrology, electromagnetic damper, joule balance, low magnetic field leakage, no inherent force

中图分类号:

TH73

王大伟, 许金鑫, 刘永猛, 白洋, 曾涛, 李正坤, 张钟华, 谭久彬. 能量天平精密无固有力低漏磁电磁阻尼器的设计与应用[J]. 机械工程学报, 2022, 58(4): 269-276.

WANG Dawei, XU Jinxin, LIU Yongmeng, BAI Yang, ZENG Tao, LI Zhengkun, ZHANG Zhonghua, TAN Jiubin. Design and Application of No Inherent Force and Low Magnetic Leakage Precision Damper for Joule Balance[J]. Journal of Mechanical Engineering, 2022, 58(4): 269-276.

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能量天平精密无固有力低漏磁电磁阻尼器的设计与应用

Design and Application of No Inherent Force and Low Magnetic Leakage Precision Damper for Joule Balance

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