单晶硅的电火花线切割过程建模与控制

doi:10.3901/JME.2018.17.149

机械工程学报 ›› 2018, Vol. 54 ›› Issue (17): 149-156.doi: 10.3901/JME.2018.17.149

• 特邀专栏：智能制造装备 • 上一篇下一篇

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单晶硅的电火花线切割过程建模与控制

路雄¹, 李淑娟¹, 辛彬¹, 武小宇¹, 赵子瑜¹, 李言¹, 蒋百灵², 李玉玺³

1. 西安理工大学机械与精密仪器工程学院西安 710048;
2. 西安理工大学材料科学与工程学院西安 710048;
3. 西安现代控制技术研究所西安 710065

收稿日期:2017-09-05 修回日期:2018-02-10 出版日期:2018-09-05 发布日期:2018-09-05
通讯作者: 李淑娟(通信作者),女,1968年出生,博士,教授,博士研究生导师。主要研究方向为硬脆材料的加工机理及控制、制造过程建模、优化和控制。E-mail:shujuanli@xaut.edu.cn
作者简介:路雄,1993年出生。主要研究方向为特种加工技术。E-mail:luxiong2015@sina.com
基金资助:
国家自然科学基金（51575442）、陕西省自然科学基金（2016JZ011）和陕西省教育厅基金（2014SZS10-Z01）资助项目。

Modeling and Control of WEDM Process of Silicon Single Crystal

LU Xiong¹, LI Shujuan¹, XIN Bin¹, WU Xiaoyu¹, ZHAO Ziyu¹, LI Yan¹, JIANG Bailing², LI Yuxi³

1. School of Mechanical and Precision Instrument Engineering, Xi'an University of Technology, Xi'an 710048;
2. School of Material Science and Engineering, Xi'an University of Technology, Xi'an 710048;
3. Xi'an Modern Control Technology Research Institute, Xi'an 710065

Received:2017-09-05 Revised:2018-02-10 Online:2018-09-05 Published:2018-09-05

摘要/Abstract

摘要： 电火花线切割半导体加工过程中，工件与钼丝之间的间隙是保证工件表面质量和切割效率的关键参数。分析了单晶硅和钼丝之间的间隙与极间电流的关系，由于该间隙在钼丝切入工件后，无法实时测量，根据电流的变化来实时预估间隙的瞬时变化，从而实时调整工件进给速度以间接保证该间隙。采用系统辨识方法建立极间电流与工件进给速度的控制模型，并利用F检验法估计模型的阶次，选择遗忘因子递推最小二乘在线预估模型参数。设计最小方差自校正控制器对切割过程进行实时控制。试验结果表明所设计的控制器增强了加工系统的稳定性，在保证加工效率的前提下，工件表面有了明显提高。

关键词: 单晶硅, 电火花线切割, 建模, 最小方差自校正控制

Abstract: EDM wire cutting semiconductor process, the gap between the workpiece and molybdenum wire is the key parameter to ensure the workpiece surface quality and cutting efficiency. The relationship between the gap between the silicon single crystal and the molybdenum wire is analyzed. Since the gap can not be measured in real time after the molybdenum wire has been cut into the workpiece, the instantaneous change of the gap can be estimated in real time according to the change of the current between the silicon single crystal and workpiece, and the feed rate of workpiece is used to ensure the gap. The system identification method is used to establish the control model of the current between the silicon single crystal and workpiece and the feed rate, and the order of the model is estimated by the F-test method, and the forgetting least squares is used to on-line estimate the model parameters. The controller of the minimum variance self-tuning controller is designed for real-time control of the cutting process. The experimental results show that the designed controller enhances the stability of the machining system and improves the processing surface quality under the premise of ensuring the processing efficiency.

Key words: minimum variance self-tuning control, modeling, silicon single crystal, WEDM

中图分类号:

TG661

路雄, 李淑娟, 辛彬, 武小宇, 赵子瑜, 李言, 蒋百灵, 李玉玺. 单晶硅的电火花线切割过程建模与控制[J]. 机械工程学报, 2018, 54(17): 149-156.

LU Xiong, LI Shujuan, XIN Bin, WU Xiaoyu, ZHAO Ziyu, LI Yan, JIANG Bailing, LI Yuxi. Modeling and Control of WEDM Process of Silicon Single Crystal[J]. Journal of Mechanical Engineering, 2018, 54(17): 149-156.

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单晶硅的电火花线切割过程建模与控制

Modeling and Control of WEDM Process of Silicon Single Crystal

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