Influence of Modulation Period on the Mechanical and Tribological Properties of Nano-multilayer Graphite-like Carbon Films

doi:10.3901/JME.2018.15.092

Abstract

Abstract: Six kinds of nano-multilayer graphite-like carbon (GLC) films with different modulation periods of 300 nm, 180 nm, 90 nm, 15 nm and 8 nm are deposited by a plasma enhanced multi targets magnetron sputtering system. The influence of modulation period of pure GLC film and W-GLC film on the mechanical and tribological properties of the films is analyzed. The test results show that all the deposited nano-multilayer GLC films present good mechanical and tribological properties, which improve with the decrease of modulation period and show remarkable synergistic effect. The excellent mechanical properties of the films can be attributed to the dispersion strengthening effect of WC or W₂C nanocrystals and the interfacial effect of multilayers, while the formation of thick and dense transfer film guarantee the film's good tribological properties. When the modulation period reduces to 8nm, the film hardness reaches 35.13 GPa, and the corresponding adhesive strength is 45.28 N,H/E is 0.109 5,H³/E² is 0.375, and the film has the lowest average friction coefficient of 0.002 and wear rate of 9.0×10-18 m³/(N·m) when tested at a load of 12 N and a sliding rate of 100 r/mim for 480 minutes, which shows excellent comprehensive performance.

Key words: mechanical properties, modulation period, nano-multilayer GLC films, tribological proterties

CLC Number:

TG156

MA Guozheng, YONG Qingsong, WANG Haidou, HE Pengfei, XU Binshi. Influence of Modulation Period on the Mechanical and Tribological Properties of Nano-multilayer Graphite-like Carbon Films[J]. Journal of Mechanical Engineering, 2018, 54(15): 92-99.

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