Abstract: Micro-functional devices play more and more important roles with the development of information age. The new challenges are raised about manufacturing micro-parts with high dimensional accuracy, good surface quality and minimum processing error. The surface quality and distribution of inerratic burrs of micro-grooves are investigated by using high speed milling on different kinds of materials, which are provide an theoretical basis and technical guidance for manufacturing micro-parts. In the theoretical point of view, the model of micro-cutting edge and surface trochoidal theory are introduced to analyze the causes of surface formation and generation mechanism of burrs for micro-grooves. The establishment of test equipment platform, materials physics processing performance and methods are described in detail. In allusion to the typical processing materials, the surface quality are analyzed and summarized. Subsequently, the values of surface roughness and variation of burrs distribution for micro-grooves are obtained. The characteristics and laws of surface quality are summarized. The results of test showed the minimum cutting thickness effect is produced when the ratio of the feed per tooth to the radius of cutting edge is smaller than 1. What’s more, with the gradually increasing the feed and spindle speed, the surface roughness Ra of the groove bottom is gradually reduced. The numbers and height difference of burrs distribution are decreased with the increasing of the spindle speed and feed per tooth. The laws are obtained in high-speed micro-milling research for micro grooves, which has some certain guidance significances on the processing mechanism of deep-level surface quality.

Key words: Burrs, Micro milling parameters, Minimum milling thickness effect, Surface roughness