Investigation on Measurement Method of Ultra-precision Turning Surface Roughness Based on Multi-wavelength Scattering Characteristic

doi:10.3901/JME.2023.03.308

Abstract

Abstract: For ultra-precision turning surface, a surface roughness measurement method based on a multi-wavelength scattering characteristic is proposed, which is further validated with an aluminum alloy material. First, a theoretical model of surface topography-light scattering for ultra-precision turning surface are established. A validation experiment is performed. Quantitative experimental results show that the average error of the scattering model is only 1%. Based on this scattering model, the influence of turning mark direction, turning mark width (feed rate per revolution), and turning mark height (peak-valley surface roughness) on the specular reflectivity is studied. Investigation results show that surface roughness is the critical influencing factor of specular reflectivity. On this basis, the quantitative relationship between average specular reflectivity from 300 to 700 nm and surface roughness is established, which is validated based on the ultra-precision diamond turning experiment results. The surface roughness results achieved by the newly developed method is consistent with the results measured by atomic force microscope (AFM). The maximum relative error is only 7.5%.

Key words: ultra-precision machining, scattering characteristic, surface roughness, measurement method

CLC Number:

TG519

HE Chunlei, ZHANG Jianguo, WANG Shuqi, REN Chengzu. Investigation on Measurement Method of Ultra-precision Turning Surface Roughness Based on Multi-wavelength Scattering Characteristic[J]. Journal of Mechanical Engineering, 2023, 59(3): 308-317.

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