EFFECT OF SUBSTRATE TEMPERATURE ON PROPERTIES OF THE DIAMOND-LIKE CARBON DEPOSITED BY PULSED VACUUM ARC PLASMA DEPOSITION

Abstract

Abstract: Diamond-like carbon(DLC) films are deposited on Cr17Ni14Cu4 stainless steel and Si(100) substrates as a function of substrate temperature by pulsed vacuum arc plasma deposition. The results show that the sp3 carbon atoms content decreas as the substrate temperature increases. The microhardness of DLC films decrease when the substrate temperature increases. The DLC films which are deposited at 100℃ to 300℃ have the low friction coefficient and good wear resistance. The wear resistance of the DLC films deposites on Cr17Ni14Cu4 substrate is much better than that of Cr17Ni14Cu4 stainless steel. But the wear resistance decreases as the substrate temperature increases and the DLC film deposites at 400℃ has low wear resistance. The DLC films have good adherence with the stainless steel substrate.

Key words: Diamond-like carbon, Microhardness, Pulsed vacuum arc plasma deposition, Substrate temperature, Wear resistance, X-ray photoelectron spectroscopy

CLC Number:

TG17

Leng Yongxiang;Sun Yongchun;Sun Hong;Chen Junying;Wang Jin;Huang Nan. EFFECT OF SUBSTRATE TEMPERATURE ON PROPERTIES OF THE DIAMOND-LIKE CARBON DEPOSITED BY PULSED VACUUM ARC PLASMA DEPOSITION[J]. , 2004, 40(7): 20-23.

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EFFECT OF SUBSTRATE TEMPERATURE ON PROPERTIES OF THE DIAMOND-LIKE CARBON DEPOSITED BY PULSED VACUUM ARC PLASMA DEPOSITION

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