Two-degree-of-freedom Parallel Piezoelectric Stick-slip Positioning Platform

doi:10.3901/JME.2024.11.250

Abstract

Abstract: Regarding the fatigue problem of compliant mechanisms arising from the cyclic stress of viscous-slip motion, a low-stress, high-resolution, decoupled two-degree-of-freedom macro stroke positioning platform is designed. Bionic flexible hinges with double circular arcs are used in designing the compliant driving unit, thus reducing stress and improving structural stiffness. Then, piezoelectric stick-slip driving is combined with the orthogonal guidance mechanism to realize the platform's high-resolution, large-stroke two-dimensional parallel decoupled motion. After that, the finite element method and pseudo-rigid body model are used to analyze the positioning platform statically and dynamically, and the platform stress, frequency, and single-step displacement are simulated by ANSYS Workbench software. Finally, the experimental platform is built, and performances are tested. The experimental results show that the maximum velocity of the platform is 9.03 mm/s, the x- and y-directional displacement coupling rate is 0.89% and 0.92%, the resolution is 10 nm and 11 nm, and the maximum horizontal and vertical load capacity is 1.4 N and 40 N. The validity of the structural design and theoretical model is verified by experimental results.

Key words: piezoelectric actuation, stick-slip motion, low stress, compliant mechanism, two degrees of freedom

CLC Number:

TP242

XU Meng, YANG Yiling, WU Gaohua, CUI Yuguo, WEI Yanding. Two-degree-of-freedom Parallel Piezoelectric Stick-slip Positioning Platform[J]. Journal of Mechanical Engineering, 2024, 60(11): 250-258.

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