An In-situ Online Micro-nano Structure Read-write Method Based on Scanning Probe

doi:10.3901/JME.2021.05.148

Abstract

Abstract: The meniscus confined electrochemical deposition method (MCED) based on scanning probes has been widely interested by many researchers in recent years, due to its ability to perform shaping and surface modification at the micro-nano scale. However, in the process of three-dimensional micro-nano fabrication, the structure morphology cannot be online "read out" in-situ, which limits its application. The study comparatively analyzed the similarities and differences in system configuration and principle between MCED and scanning electrochemical cell microscopy (SECCM). Secondly, an AC modulation mode of SECCM is proposed to in-situ image the micro-nano structure fabricated by MCED. Comparing the DC mode scanning images with AC mode, it is found that the AC scanning mode can overcome the shortcomings of the damage caused by the DC scanning mode to the surface of the sample, the anti-interference ability of the AC scanning mode is significantly improved, and the MSE of the image is decreased by nearly 27.85%. Finally, by comparing the results of AC scanning mode imaging and scanning electron microscope imaging, it is verified that AC scanning mode can better perform in-situ imaging of samples, reducing the complexity and improving the accuracy of MCED experimental operation, making online MCED micro-nano operation visualization, continuous manufacturing, fixed-point modification, etc. become possible. Therefore, this method will be of great significance for broadening the application of MCED in the micro-nano field.

Key words: meniscus confined electrochemical deposition(MCED), micro-nano three-dimensional printing, AC modulation scanning mode of SECCM, in-situ online imaging

CLC Number:

TG156

LIAO Xiaobo, ZHUANG Jian, DENG Yalou, WANG Zhiwu, JIAOYANG Bohan, CAI Yong, LIAO Xuan. An In-situ Online Micro-nano Structure Read-write Method Based on Scanning Probe[J]. Journal of Mechanical Engineering, 2021, 57(5): 148-156.

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