Structure Design Method of Complaint Parallel Mechanism for Grating Tiling with Heavy Load Capacity and High Precision

doi:10.3901/JME.2020.19.113

Abstract

Abstract: Due to the limitation of the processing technology, the large-aperture grating is usually tiled by using mechanical tiling technique with small segments. In order to guarantee the success of target shooting, the grating tiling mechanism is required to achieve nano-scale motion accuracy. The compliant parallel mechanism actuated by piezoelectric can achieve nano-scale motion accuracy, however, flexible joints reduce the bearing capacity of the mechanism. To solve the contradiction between "heavy load" and "high precision" in the compliant parallel mechanism. A class grating compliant parallel mechanism with large stroke, heavy load capacity, high precision is proposed based on constraint-based method by decoupling driving and moving units. And, it has the characteristics of rigid-flexible hybrid, series-parallel hybrid, three orthogonal planes, single point supporting, and precisely constrained passive chain. To realize high precision motion, the kinematics analysis of the grating tiling mechanism was carried out. Finally, a series of experiments are carried out to test the motion accuracy. The experimental results show that the compliant parallel mechanism can meet the requirements of grating tiling tasks.

Key words: grating tiling, complaint parallel mechanism, heavy load capacity, kinematics analysis

CLC Number:

TH12

WU Shilei, SHAO Zhongxi, SU Haijun, FU Hongya. Structure Design Method of Complaint Parallel Mechanism for Grating Tiling with Heavy Load Capacity and High Precision[J]. Journal of Mechanical Engineering, 2020, 56(19): 113-121.

References

[1] BAI Qingshun,LIANG Yingchun,CHENG Kai,et al. Design and analysis of a novel large-aperture grating device and its experimental validation[J]. Proceedings of the Institution of Mechanical Engineers Part B,Journal of Engineering Manufacture,2013,227(9):1349-1359.
[2] SHAO Zhongxi,WU Shilei,WU Jinguo,et al. A novel 5-DOF high-precision compliant parallel mechanism for large-aperture grating tiling[J]. Mechanical Sciences,2017,8(2):349-358.
[3] 邵忠喜,韩德东,周维江,等. 机械式光栅拼接稳定性全闭环控制技术研究[J]. 机械工程学报,2015,51(10):205-212. SHAO Zhongxi,HAN Dedong,ZHOU Weijiang,et al. Research on the full closed-loop control technology to the stability of the mechanical grating tiling[J]. Journal of Mechanical Engineering,2015,51(10):205.
[4] 邵忠喜,吴石磊,富宏亚. 一种新型大口径光栅拼接柔性定位机构刚度分析[J]. 机械工程学报,2018,54(13):117-125. SHAO Zhongxi,WU Shilei,FU Hongya. Stiffness analysis of a novel flexible positioning mechanism for large-aperture grating tiling[J]. Journal of Mechanical Engineering,2018,54(13):117-125.
[5] WANG Yong,LIU Zhigang,BO Feng,et al. Design and control of an ultra-precision stage used in grating tiling[J]. Chinese Journal of Mechanical Engineering,2007,20(1):1-4.
[6] HORNUNG M,BÖDEFELD R,SIEBOLD M,et al. Alignment of a tiled-grating compressor in a high-power chirped-pulse amplification laser system[J]. Applied optics,2007,46(30):7432-7435.
[7] QIAO J,KALB A,GUARDALBEN M J,et al. Large-aperture grating tiling by interferometry for petawatt chirped pulse amplification systems[J]. Optics Express,2007,15(15):9562-9574.
[8] Blanchot N,Bar E,Behar G,et al. Experimental demonstration of a synthetic aperture compression scheme for multi-petawatt high-energy lasers[J]. Optics express,2010,18(10):10088-10097.
[9] 邱丽芳,王晶琳,刘宁宁. 基于拉力带参数的IST-LEJ设计与分析[J]. 机械工程学报,2018,54(13):94-101. QIU Lifang,WANG Jinglin,LIU Ningning. Design and analysis of IST-LEJ based on tension band parameters[J]. Journal of Mechanical Engineering,2018,54(13):94-101.
[10] XIE Zhongtian,QIU Lifang,YANG Debin. Design and analysis of a variable stiffness inside-deployed lamina emergent joint[J]. Mechanism and Machine Theory,2018,120:166-177.
[11] 李佳杰,陈贵敏. 柔性二级差动式微位移放大机构优化设计[J]. 机械工程学报,2019,55(21):21-28. LI Jiajie,CHEN Guimin. Optimal design of a compliant two-stage differential displacement amplification mechanism[J]. Journal of Mechanical Engineering,2019,55(21):21-28.
[12] CHEN Guimin,MA Yakun,LI Jiajie. A tensural displacement amplifier employing elliptic-arc flexure hinges[J]. Sensors & Actuators A Physical,2016,247(247):307-315.
[13] LI Jiajie,CHEN Guimin. A general approach for generating kinetostatic models for planar flexure-based compliant mechanisms using matrix representation[J]. Mechanism and Machine Theory,2018,129:131-147.
[14] WANG Ruizhou,ZHANG Xianmin. Optimal design of a planar parallel 3-DOF nanopositioner with multi-objective[J]. Mechanism and Machine Theory,2017,112:61-83.
[15] WANG Nianfeng,ZHANG Zhiyuan,ZHANG Xianmin,et al. Optimization of a 2-DOF micro-positioning stage using corrugated flexure units[J]. Mechanism and Machine Theory,2018,121:683-696.
[16] WANG Nianfeng,LIANG Xiaohe,ZHANG Xianmin. Stiffness analysis of corrugated flexure beam used in compliant mechanisms[J]. Chinese Journal of Mechanical Engineering,2015,28(4):776-784.
[17] WANG Nianfeng,ZHANG Zhiyuan,Yue FUE Fan,et al. Design and analysis of translational joints using corrugated flexural beams with conic curve segments[J]. Mechanism and Machine Theory,2019,132:223-235.
[18] 王念峰,张志远,张宪民,等. 三种两自由度柔顺精密定位平台的性能对比与分析[J]. 机械工程学报,2018,54(13):102-109. WANG Nianfeng,ZHANG Zhiyuan,ZHANG Xianmin,et al. Performance comparison and analysis of three 2-DOF compliant precision positioning stages[J]. Journal of Mechanical Engineering,2018,54(13):102-109.
[19] 于靖军,郝广波,陈贵敏,等. 柔性机构及其应用研究进展[J]. 机械工程学报,2015,51(13):53-68. YU Jingjun,HAO Guangbo,CHEN Guimin,et al. State-of-art of compliant mechanisms and their applications[J]. Journal of Mechanical Engineering,2015,51(13):53-68.
[20] 于靖军,裴旭,毕树生,等. 柔性铰链机构设计方法的研究进展[J]. 机械工程学报,2010,46(13):2-13. YU Jingjun,PEI Xu,BI Shusheng,et al. State-of-arts of design method for flexure mechanisms[J]. Journal of Mechanical Engineering,2010,46(13):2-13.
[21] 李海洋,郝广波,于靖军,等. 空间平动柔性并联机构的系统设计方法研究[J]. 机械工程学报,2018,54(13):57-65. LI Haiyang,HAO Guangbo,YU Jingjun,et al. Systematic approach to the design of spatial translational compliant parallel mechanisms[J]. Journal of Mechanical Engineering,2018,54(13):57-65.
[22] MURPHY M D,MIDHA A,HOWELL L L. The topological synthesis of compliant mechanisms[J]. Mechanism and Machine Theory,1996,31(2):185-199.
[23] BLANDING D L. Exact constraint:Machine design using kinematic principle[M]. New York:ASME Press, 1999.
[24] HAO Guangbo,KONG Xianwen. A structure design method for compliant parallel manipulators with actuation isolation[J]. Mechanical Sciences,2016,7(2):247-253.
[25] SU Haijun,DOROZHKIN D V,VANCE J M. A screw theory approach for the conceptual design of flexible joints for compliant mechanisms[J]. Journal of Mechanisms and Robotics,2009,1(4):041009.
[26] YU Jingjun,LI Shouzhong,PEI Xu,et al. Type synthesis principle and practice of flexure systems in the framework of screw theory part I:General methodology[C]//2010 ASME International Design Engineering Conference,Aug. 15-18,2010,Montreal,Canada. New York:ASME,2010:DETC2010-28783.
[27] KONG Xianwen,GOSSELIN C M. Type synthesis of parallel mechanisms[M]. Springer,2007.
[28] YUE Yi,GAO Feng,GE Hao. The reducible design of 6-DOF parallel micro manipulator based on screw theory[C]//13th World Congress in Mechanism and Machine Science,Guanajuato,México,19-25 June,2011:117-185.