Abstract: The inertial confinement fusion puts forward higher requirement on the stability of the mechanical grating tiling. The full closed-loop control technology is applied to achieve high stability of the grating tiling. In order to improve the stitching accuracy of the grating device, the motion performance of flexible mechanism is analyzed and the accurate motion control algorithm of the splicing mechanism is deduced in theory. With using the capacitive micro displacement sensor as the feedback element, the position and posture monitoring algorithm is derived. The single neuron adaptive PID full closed-loop control for the stability of the grating tiling is realized by comprehensive application of the motion control algorithm and the position and posture monitoring algorithm. The optics inspection system is designed to carry out the stitching experiment and the movement accuracy and stability of the splicing device are tested to evaluate the feasibility of the full closed-loop control to the stability of the grating tiling. The experimental results show that the stitching accuracy reaches 0.2 μrad/step (rotation) and 10 nm/step(translation), and the stabilization precision is less than 1.2 μrad/30 min(rotation) and the translational accuracy is less them 24 nm/30 min(translation). The stitching accuracy and the stabilization precision meet the requirement of the grating splicing task.

Key words: full closed-loop control, grating tiling, high precision control, high stability control, inertial confinement fusion, position and posture monitoring