Abstract: Micro-grinding as an method for micro-machining component of hard brittle material gets much more concerns in micro-manufacturing field, a ductile and brittle regime combined process in hard brittle material micro-grinding removal is proposed by analyzing material removal mechanism, the micro-grinding surface formation model is built by concerning and focusing on the differences between convention grinding and micro-grinding process. In order to prove the mathematical models of micro-grinding undeformed chip thickness hm and surface roughness Ra, an micro-grinding orthogonality experiment on soda-lime glass is designed and carried out. From analysis of experiment results, surface topography and surface roughness effects in micro-grinding hard brittle material are revealed, the surface formation model proposed by is also confirmed. A series of micro-machining surfaces of brittle material between Ra 78 nm to 0.98 μm is achieved, and research theory and experimental reference are provided for hard brittle material mciro-grinding surface formation mechanism.

Key words: Micro-grinding, Surface formation model, Topography analysis, Undeformed chip thickness