Abstract: Ultra-precision machining is invariably used in the production of components of the highest quality in terms of form accuracy, surface finish accuracy and surface integrity. The optical, mechanical, and electronic application of advanced ceramics and glasses may require high form and finish accuracy (e.g. roughness in the angstrom range), the depth and nature of the subsurface damage resultant from processing may be equally important. For economic manufacture and for improved reliability of brittle materials, an understanding of the mecha-nisms of material removal in ultra-precision machining proc-esses, as well as the nature damage imparted, is essential pre-requisites. The historical progress of ultra-precision machining is plotted, and some significant advanced ultra-precision ma-chining techniques with emphasis on the mechanismsof mate-rial removal in the processing of brittle workmaterials is fo-cused on. Ultra-precision cutting, grinding and polishing are involved and compared in terms of finishing accuracy and effi-cienty. Semibonded abrasive machining is introduced which aims to high finishing accuracy and high efficiency. The prob-able further trend of ultra-precision machining is forecasted.

Key words: Abrasive machining, Semibonded abrasive machining, Ultra-precision machining