Abstract: In micro machine devices, defects such as the broken structure and unwanted anchors exist frequently for the fabrication causes. These defects influence the performance of the micro machine devices greatly. Three-dimension dynamic model of micro beam is established and nodal analysis method is used to analyze the dynamic characteristics of the micro machine structure. The computational results show that the beam breaking reduces the stiffness of the micro machine structure and causes the decrease of its modal frequencies. And that the opposite conclusion is gained for the unwanted anchor.

Key words: Defects, Dynamic model, Micro-machine, Modal analysis, Four dimensional force measuring platform Overloaded parallel Mechanical decoupling Self-calibration