Abstract: Based on the understanding of symmetry of the microstructures and applied load are not same, the lateral vibration of electro-static driven comb microresonant which suspended by four crab-leg flexure is investigated. It is found that the simple mechanical model of it is a super-fluous system with five unknown variables. The calculating way of the stress, lateral displacement, spring coefficient and resonant frequency is deducted. Compared with the model of steady system, which published before, the result shows the essential aspect of this problem.

Key words: Crab-leg flexural suspension, Electro-static driven microresonator, Lateral vibration analysis, MEMS