Research Status and Development Trend of MEMS Detonators

doi:10.3901/JME.2021.22.359

Abstract

Abstract: In recent years, surface dielectric barrier discharge plasma actuator(SDBD-PA) has become a research hotspot in the field of flow control. In order to study the breakdown characteristics of SDBD-PA and provide a reference for the selection of parameter interval of SDBD-PA related research, the control variable method is used to study the influence of the actuator parameters on SDBD-PA breakdown voltage and discharge stability, select the actuator parameters that have an effect on the breakdown voltage, experiment based on DOE method, use the Isight software to establish the quadratic regression model and analyze the effect of actuator parameters on the breakdown voltage. The results show that the parameters affecting the breakdown voltage and discharge stability of SDBD-PA are as follows:frequency f, electrode gap d₁ and the length of the actuator L; the fitting ternary quadratic regression model is proved to have good accuracy and can be used as the prediction model of SDBD-PA breakdown voltage; f is the most influential parameter to SDBD-PA breakdown voltage, followed by L and d₁;f and L have a negative effect on the breakdown voltage, while d₁ has a positive effect; the interaction between d₁ and f and between f and L also have a great influence on the breakdown voltage, but the interaction between d₁ and L has a very small influence on the breakdown voltage.

Key words: MEMS detonator, explosive foil, semiconductor bridge, energetic material, porous silicon

CLC Number:

TJ45

HU Tengjiang, REN Wei, ZHAO Yulong. Research Status and Development Trend of MEMS Detonators[J]. Journal of Mechanical Engineering, 2021, 57(22): 359-368.

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