Bias Stability Optimization Technique for Silicon Micro-resonant Accelerometer Based on Interval Temperature Compensation and Data Fusion

doi:10.3901/JME.260491

Abstract

Abstract: To address the deterioration of zero bias stability in silicon micro-resonant accelerometers under temperature varia tions, a collaborative optimization technique combining interval temperature compensation and data fusion is proposed. A dual double-ended tuning fork(DETF) temperature response simulation model is established to reveal the zero-point drift mechanism caused by thermal effects. An innovative interval temperature compensation algorithm is developed, employing sliding windows for real-time fitting of temperature coefficients and dynamically weighted compensation to eliminate temperature response differences between dual DETFs. Kalman filter-based data fusion technology is integrated to suppress residual noise, forming a synergistic optimization mechanism. Experimental validation is conducted using a measurement prototype built on the Zynq 7020 platform and a stress-isolated silicon micro-resonant accelerometer framework. Full-temperature testing under cyclic temperature variations ( -40-60 ℃) demonstrates that the collaborative approach achieves 95.19% improvement in zero bias stability compared to uncompensated conditions, confirming effectiveness in complex thermal environments. The method outperforms single-strategy approaches: 62.88% better than standalone temperature compensation and 99.9% better than pure data fusion. New insights are provided for optimizing MEMS accelerometer performance under significant temperature fluctuations.

Key words: MEMS, silicon micro-resonant accelerometer, temperature compensation, data fusion, zero-bias stability, FPGA

CLC Number:

TH701

LI Ting, ZHOU Wu, LI He, ZHANG Binglei, MA Qingshan, LI Ang, MA Zhongrui, WEI Zhaoli, RAN Longqi. Bias Stability Optimization Technique for Silicon Micro-resonant Accelerometer Based on Interval Temperature Compensation and Data Fusion[J]. Journal of Mechanical Engineering, 2026, 62(10): 62-72.

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URL: http://www.cjmenet.com.cn/EN/10.3901/JME.260491

http://www.cjmenet.com.cn/EN/Y2026/V62/I10/62

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