Research on Process Parameters of Room-temperature Molding Quality of Fused Silica

doi:10.3901/JME.2025.18.098

Abstract

Abstract: In the early stage, the team proposed a room-temperature molding method for fused silica components that do not need polymer materials. Although the feasibility of this method had been proven, the influence of process parameters was still unclear. In response to the above issues, a study was conducted on the process parameters of fused silica forming quality based on a pressure controlled and speed controlled molding device. The designed molding device is capable of providing a maximum compression force of 15 kN, with a compression rate controllable to an accuracy of 0.01 mm/s. Additionally, a force-position coordinated control strategy is proposed for the molding process. Through experiments on the influence of molding process parameters, it is found that both excessive high or low pressing forces significantly increase the surface roughness of fused silica lenses. Moreover, the increasing pressing rate led to a rise in both the surface roughness and the maximum contour curvature of the fused silica lenses. Based on the optimized molding process parameters, the miniature lens array experiment is conducted. Through point light source imaging, it is verified that the optimization of molding process parameters plays a crucial role in enhancing the optical performance of the miniature lens arrays.

Key words: fused silica lenses, molding device design, process parameters, miniature lens array

CLC Number:

TH12

ZHU Zhiwei, XIA Haiwei, XU Ya, XU Jianghai. Research on Process Parameters of Room-temperature Molding Quality of Fused Silica[J]. Journal of Mechanical Engineering, 2025, 61(18): 98-106.

References

[1] LIU X Q，YU L，YANG S N，et al. Optical nanofabrication of concave microlens arrays[J]. Laser & Photonics Reviews，2019，13(5)：1800272.
[2] DYLLA S R. Preshaping clear glass at low temperatures[J]. Science，2021，372(6538)：126-127.
[3] 蒋小为，龙兴武，谭中奇. 光学玻璃超精密抛光加工中材料去除机理研究综述[J]. 中国激光，2021，48(4)：236-253. JIANG Xiaowei，LONG Xingwu，TAN Zhongqi. A review of material removal Mechanism in ultra-precision polishing of optical glass[J]. Chinese Journal of Lasers，2021，48(4)：236-253.
[4] WANG W，YAO P，WANG J，et al. Crack-free ductile mode grinding of fused silica under controllable dry grinding conditions[J]. International Journal of Machine Tools and Manufacture，2016，109：126-136.
[5] ROSS C A，MACLACHLAN D G，CHOUDHURY D，et al. Optimisation of ultrafast laser assisted etching in fused silica[J]. Optics express，2018，26(19)：24343-24356.
[6] SAKAKURA M，LEI Y，WANG L，et al. Ultralow-loss geometric phase and polarization shaping by ultrafast laser writing in silica glass[J]. Light：Science & Applications，2020，9(1)：15.
[7] 赵林杰，程健，陈明君，等. 熔石英光学元件的CO₂激光加工技术研究新进展[J]. 机械工程学报，2020，56(11)：202-218. ZHAO Linjie，CHENG Jian，CHEN Mingjun，et al. New progress of CO₂ laser processing techniques for fused silica optics[J]. Journal of Mechanical Engineering，2020，56(11)：202-218.
[8] HUENTEN M，HOLLSTEGGE D，WANG F，et al. Wafer level glass optics：precision glass molding as an alternative manufacturing approach[C]//Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV. SPIE，2011，7927：94-100.
[9] ZHOU T，LIU X，LIANG Z，et al. Recent advancements in optical microstructure fabrication through glass molding process[J]. Frontiers of Mechanical Engineering，2017，12：46-65.
[10] 尹韶辉，朱科军，余剑武，等. 小口径非球面玻璃透镜模压成形[J]. 机械工程学报，2012，48(15)：182-192. YIN Shaohui，ZHU Kejun，YU Jianwu，et al. Micro aspheric glass lens molding process[J]. Journal of Mechanical Engineering，2012，48(15)：182-192.
[11] TOOMBS J T，LUITZ M，COOK C C，et al. Volumetric additive manufacturing of silica glass with microscale computed axial lithography[J]. Science，2022，376(6590)：308-312.
[12] 赵圆圆，罗海超，梁紫鑫，等. 光聚合微纳3D打印技术的发展现状与趋势[J]. 中国激光，2022，49(10)：330-359. ZHAO Yuanyuan，LUO Haichao，LIANG Zixin，et al. Micro-nano 3D printing based on photopolymerization and its development status and trends[J]. Chinese Journal of Lasers，2022，49(10)：330-359.
[13] KOTZ F，PLEWA K，BAUER W，et al. Liquid glass：a facile soft replication method for structuring glass[J]. Advanced Materials (Deerfield Beach，Fla.)，2016，28(23)：4646-4650.
[14] MADER M，SCHLATTER O，HECK B，et al. High-throughput injection molding of transparent fused silica glass[J]. Science，2021，372(6538)：182-186.
[15] XU Y，DU X，WANG Z，et al. Room‐temperature molding of complex‐shaped transparent fused silica lenses[J]. Advanced Science，2023，10(34)：2304756.
[16] LIN Z，ZHAO X，WANG C，et al. Rapid pressureless sintering of glasses[J]. Small，2022，18(17)：2107951.
[17] 舒阳，周志雄，黄向明，等. 精密热压成型机关键技术研究与实现[J]. 机械工程学报，2018，54(17)：200-207. SHU Yang，ZHOU Zhixiong，HUANG Xiangming，et al. Research and implementation on critical technology of precision compression molding tool[J]. Journal of Mechanical Engineering，2018，54(17)：200-207.
[18] 董晓彬，周天丰，庞思勤，等. 玻璃模压成形用微沟槽磷化镍模具的超精密切削加工[J]. 光学精密工程，2017，25(12)：2986-2993. DONG Xiaobin，ZHOU Tianfeng，PANG Siqin，et al. Ultraprecision microgroove machining of nickel phosphorous plating mold for glass molding[J]. Optics and Precision Engineering，2017，25(12)：2986-2993.